Coordinate measurement of micro groove on MEMS device by optically controlled microprobe

Mitsutoshi Kobayashi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

抄録

Recently, ultra-high accuracy coordinate measuring m achine (Nano-CMM) is demanded for inspecting 3D shapes of micro components. The most important element to achieve the Nano-CMM is the probe for sensing surfaces of 3D components. In this study, laser trapping probe, which is the micro-sphere trapped in air by optical radiation pressures, is proposed as a novel probe. In this paper, micro-groove structure on micro electromechanical system (MEMS) device is measured by using laser trapping probe with circular motion, which is improved to have same sensing property by use of the element of radial polarization. The probe has a diameter of 8 μm while conventional micro probes have a diameter of several tens of μm. The small probe makes it possible to measure narrow space of 50 μm. Moreover, the probe enables to measure specimen regardless of the approaching direction. This shows the potential that laser trapping probe enables to measure any micro structure with same manner. Although there are some conjectures to resolve, it seems that the laser trapping probe is validity as a probe for Nano-CMM.

本文言語英語
ホスト出版物のタイトル2010 International Symposium on Optomechatronic Technologies, ISOT 2010
DOI
出版ステータス出版済み - 2010
外部発表はい
イベント2010 International Symposium on Optomechatronic Technologies, ISOT 2010 - Toronto, ON, カナダ
継続期間: 10月 25 201010月 27 2010

出版物シリーズ

名前2010 International Symposium on Optomechatronic Technologies, ISOT 2010

その他

その他2010 International Symposium on Optomechatronic Technologies, ISOT 2010
国/地域カナダ
CityToronto, ON
Period10/25/1010/27/10

!!!All Science Journal Classification (ASJC) codes

  • 機械工学

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