Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition

Y. Hayashi; T. Tokunaga; T. Soga; T. Jimbo; Y. Yogata; S. Toh; Kenji Kaneko

doi:10.1063/1.1666998

Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition

Y. Hayashi, T. Tokunaga, T. Soga, T. Jimbo, Y. Yogata, S. Toh, Kenji Kaneko

材料加工工学

研究成果: Contribution to journal › Article › 査読

19 被引用数 (Scopus)

抄録

The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.

本文言語	英語
ページ（範囲）	2886-2888
ページ数	3
ジャーナル	Applied Physics Letters
巻	84
号	15
DOI	https://doi.org/10.1063/1.1666998
出版ステータス	出版済み - 4 12 2004

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

文献へのアクセス

10.1063/1.1666998

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引用スタイル

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abstract = "The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.",

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AU - Hayashi, Y.

AU - Tokunaga, T.

AU - Soga, T.

AU - Jimbo, T.

AU - Yogata, Y.

AU - Toh, S.

AU - Kaneko, Kenji

PY - 2004/4/12

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