Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas

Ren Zhou, Kento Mori, Hiroshi Ohtomo, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratan

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.

元の言語英語
ホスト出版物のタイトルTHERMEC 2018
編集者Tara Chandra, Mihail Ionescu, R. Shabadi, C. Richard, M. Jeandin
出版者Trans Tech Publications Ltd
ページ2104-2108
ページ数5
ISBN(印刷物)9783035712087
DOI
出版物ステータス出版済み - 1 1 2018
イベント10th International Conference on Processing and Manufacturing of Advanced Materials, 2018 - Paris, フランス
継続期間: 7 9 20187 13 2018

出版物シリーズ

名前Materials Science Forum
941 MSF
ISSN(印刷物)0255-5476

会議

会議10th International Conference on Processing and Manufacturing of Advanced Materials, 2018
フランス
Paris
期間7/9/187/13/18

Fingerprint

Beam plasma interactions
cross correlation
low pressure
Nanoparticles
Plasmas
nanoparticles
interactions

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

これを引用

Zhou, R., Mori, K., Ohtomo, H., Yamashita, D., Seo, H., Itagaki, N., ... Shiratan, M. (2018). Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. : T. Chandra, M. Ionescu, R. Shabadi, C. Richard, & M. Jeandin (版), THERMEC 2018 (pp. 2104-2108). (Materials Science Forum; 巻数 941 MSF). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.941.2104

Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. / Zhou, Ren; Mori, Kento; Ohtomo, Hiroshi; Yamashita, Daisuke; Seo, Hyunwoong; Itagaki, Naho; Koga, Kazunori; Shiratan, Masaharu.

THERMEC 2018. 版 / Tara Chandra; Mihail Ionescu; R. Shabadi; C. Richard; M. Jeandin. Trans Tech Publications Ltd, 2018. p. 2104-2108 (Materials Science Forum; 巻 941 MSF).

研究成果: 著書/レポートタイプへの貢献会議での発言

Zhou, R, Mori, K, Ohtomo, H, Yamashita, D, Seo, H, Itagaki, N, Koga, K & Shiratan, M 2018, Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. : T Chandra, M Ionescu, R Shabadi, C Richard & M Jeandin (版), THERMEC 2018. Materials Science Forum, 巻. 941 MSF, Trans Tech Publications Ltd, pp. 2104-2108, 10th International Conference on Processing and Manufacturing of Advanced Materials, 2018, Paris, フランス, 7/9/18. https://doi.org/10.4028/www.scientific.net/MSF.941.2104
Zhou R, Mori K, Ohtomo H, Yamashita D, Seo H, Itagaki N その他. Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. : Chandra T, Ionescu M, Shabadi R, Richard C, Jeandin M, 編集者, THERMEC 2018. Trans Tech Publications Ltd. 2018. p. 2104-2108. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.941.2104
Zhou, Ren ; Mori, Kento ; Ohtomo, Hiroshi ; Yamashita, Daisuke ; Seo, Hyunwoong ; Itagaki, Naho ; Koga, Kazunori ; Shiratan, Masaharu. / Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. THERMEC 2018. 編集者 / Tara Chandra ; Mihail Ionescu ; R. Shabadi ; C. Richard ; M. Jeandin. Trans Tech Publications Ltd, 2018. pp. 2104-2108 (Materials Science Forum).
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