Crystal quality evaluation of 6H-SiC layers grown by liquid phase epitaxy around micropipes using micro-Raman scattering spectroscopy

T. Ujihara, Shinji Munetoh, K. Kusunoki, K. Kamei, N. Usami, K. Fujiwara, G. Sazaki, K. Nakajima

研究成果: ジャーナルへの寄稿記事

6 引用 (Scopus)

抄録

We performed homoepitaxial growth of 6H-SiC layers on substrates including micropipes by the LPE method and evaluated the crystal quality by Raman scattering spectroscopy. In particular, we focused on the crystal quality of layers covering micropipes. It was made clear that there is no stress due to morphological macroscopic defects in the crystal over micropipes. Moreover, LPE growth not only closes a micropipe but also reduces the inhomogeneity of carrier density which exists in the area of the micropipe before growth.

元の言語英語
ページ(範囲)633-636
ページ数4
ジャーナルMaterials Science Forum
457-460
発行部数I
出版物ステータス出版済み - 2004
外部発表Yes

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Liquid phase epitaxy
liquid phase epitaxy
Raman scattering
Spectroscopy
Raman spectra
Crystals
evaluation
spectroscopy
crystals
Carrier concentration
inhomogeneity
coverings
Defects
defects
Substrates

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

これを引用

Ujihara, T., Munetoh, S., Kusunoki, K., Kamei, K., Usami, N., Fujiwara, K., ... Nakajima, K. (2004). Crystal quality evaluation of 6H-SiC layers grown by liquid phase epitaxy around micropipes using micro-Raman scattering spectroscopy. Materials Science Forum, 457-460(I), 633-636.

Crystal quality evaluation of 6H-SiC layers grown by liquid phase epitaxy around micropipes using micro-Raman scattering spectroscopy. / Ujihara, T.; Munetoh, Shinji; Kusunoki, K.; Kamei, K.; Usami, N.; Fujiwara, K.; Sazaki, G.; Nakajima, K.

:: Materials Science Forum, 巻 457-460, 番号 I, 2004, p. 633-636.

研究成果: ジャーナルへの寄稿記事

Ujihara, T, Munetoh, S, Kusunoki, K, Kamei, K, Usami, N, Fujiwara, K, Sazaki, G & Nakajima, K 2004, 'Crystal quality evaluation of 6H-SiC layers grown by liquid phase epitaxy around micropipes using micro-Raman scattering spectroscopy', Materials Science Forum, 巻. 457-460, 番号 I, pp. 633-636.
Ujihara, T. ; Munetoh, Shinji ; Kusunoki, K. ; Kamei, K. ; Usami, N. ; Fujiwara, K. ; Sazaki, G. ; Nakajima, K. / Crystal quality evaluation of 6H-SiC layers grown by liquid phase epitaxy around micropipes using micro-Raman scattering spectroscopy. :: Materials Science Forum. 2004 ; 巻 457-460, 番号 I. pp. 633-636.
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AU - Usami, N.

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AU - Sazaki, G.

AU - Nakajima, K.

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