Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, T. Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

The results of a comparative investigation on the emission characteristics of debris from CO2 laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitted from tin plasma produced by a CO 2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. The large size of droplets was also observed by silicon substrates as witness plates. A higher ion kinetic energy and lower debris emission in the case of CO2 laser in compared with Nd: YAG laser for the same laser energy of ∼50 mJ. In addition, the dynamics of the neutral atoms and the irradiated target from an Nd:YAG laser-produced tin plasma with a mass-limited micro-droplet target were investigated by imaging techniques.

元の言語英語
ホスト出版物のタイトルPhoton Processing in Microelectronics and Photonics VII
DOI
出版物ステータス出版済み - 6 17 2008
イベントPhoton Processing in Microelectronics and Photonics VII - San Jose, CA, 米国
継続期間: 1 21 20081 24 2008

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6879
ISSN(印刷物)0277-786X

その他

その他Photon Processing in Microelectronics and Photonics VII
米国
San Jose, CA
期間1/21/081/24/08

Fingerprint

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
Nd:YAG Laser
Tin
debris
Debris
Light sources
YAG lasers
tin
light sources
lithography
Plasma
Droplet
Plasmas
CO2 Laser
Lasers
lasers
Laser
Target
Kinetic energy

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Nakamura, D., Tamaru, K., Akiyama, T., Takahashi, A., & Okada, T. (2008). Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source. : Photon Processing in Microelectronics and Photonics VII [687909] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 6879). https://doi.org/10.1117/12.767894

Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source. / Nakamura, D.; Tamaru, K.; Akiyama, T.; Takahashi, A.; Okada, T.

Photon Processing in Microelectronics and Photonics VII. 2008. 687909 (Proceedings of SPIE - The International Society for Optical Engineering; 巻 6879).

研究成果: 著書/レポートタイプへの貢献会議での発言

Nakamura, D, Tamaru, K, Akiyama, T, Takahashi, A & Okada, T 2008, Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source. : Photon Processing in Microelectronics and Photonics VII., 687909, Proceedings of SPIE - The International Society for Optical Engineering, 巻. 6879, Photon Processing in Microelectronics and Photonics VII, San Jose, CA, 米国, 1/21/08. https://doi.org/10.1117/12.767894
Nakamura D, Tamaru K, Akiyama T, Takahashi A, Okada T. Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source. : Photon Processing in Microelectronics and Photonics VII. 2008. 687909. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.767894
Nakamura, D. ; Tamaru, K. ; Akiyama, T. ; Takahashi, A. ; Okada, T. / Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source. Photon Processing in Microelectronics and Photonics VII. 2008. (Proceedings of SPIE - The International Society for Optical Engineering).
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