Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, T. Okada

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

The results of a comparative investigation on the emission characteristics of debris from CO2 laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitted from tin plasma produced by a CO 2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. The large size of droplets was also observed by silicon substrates as witness plates. A higher ion kinetic energy and lower debris emission in the case of CO2 laser in compared with Nd: YAG laser for the same laser energy of ∼50 mJ. In addition, the dynamics of the neutral atoms and the irradiated target from an Nd:YAG laser-produced tin plasma with a mass-limited micro-droplet target were investigated by imaging techniques.

本文言語英語
ホスト出版物のタイトルPhoton Processing in Microelectronics and Photonics VII
DOI
出版ステータス出版済み - 6 17 2008
イベントPhoton Processing in Microelectronics and Photonics VII - San Jose, CA, 米国
継続期間: 1 21 20081 24 2008

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6879
ISSN(印刷版)0277-786X

その他

その他Photon Processing in Microelectronics and Photonics VII
国/地域米国
CitySan Jose, CA
Period1/21/081/24/08

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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