Defect and growth analysis of SiC bulk single crystals with high nitrogen doping

Tomohisa Kato, Tomonori Miura, Keisuke Wada, Eiji Hozomi, Hiroyoshi Taniguchi, Shin Ichi Nishizawa, Kazuo Arai

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

16 被引用数 (Scopus)

抄録

In this study, we report defect analysis in 4H-SiC crystals of high nitrogen doping grown by sublimation method, and we discuss key points for defect restraint. The growth was performed in two kinds of growth directions; c-axis and a-axis. In the c-axis grown crystal with carrier density greater than 1×10-19cm-3, defect propagation was confirmed in the vertical direction for a growth direction affected by the doping by x-ray topography. This phenomenon was not observed in the a-axis grown crystals. In sublimation growth, the quantity of impurities tends to increase as growth rate decreases. Therefore, in the c-axis growth of doped 4H-SiC bulk crystals, we have to be careful so that dopant does not increase too much without intention in grown layers with lower growth rate, for example at the beginning and end of the growth.

本文言語英語
ホスト出版物のタイトルSilicon Carbide and Related Materials 2006 - ECSCRM 2006 - Proceedings of the 6th European Conference on Silicon Carbide and Related Materials
編集者N. Wright, C.M. Johnson, K. Vassilevski, I. Nikitina, A. Horsfall
出版社Trans Tech Publications Ltd
ページ239-242
ページ数4
ISBN(印刷版)0878494421, 9780878494422, 9780878494422
DOI
出版ステータス出版済み - 2007
外部発表はい
イベント6th European Conference on Silicon Carbide and Related Materials, ECSCRM 20006 - Newcastle upon Tyne, 英国
継続期間: 9 3 20069 7 2006

出版物シリーズ

名前Materials Science Forum
556-557
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

会議

会議6th European Conference on Silicon Carbide and Related Materials, ECSCRM 20006
国/地域英国
CityNewcastle upon Tyne
Period9/3/069/7/06

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

フィンガープリント

「Defect and growth analysis of SiC bulk single crystals with high nitrogen doping」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル