抄録
A scanning mapping technique of surface resistance (Rs) using the sapphire dielectric resonator was developed and demonstrated for a 3-inch-diameter YBa2Cu3Oy film. The area of the 3-inch film was divided by 5 × 5 mm grid for scan, resulting in 101 measurement points. Values of Rs in the film varied from 2.9 to 3.8 mΩ at 22 GHz and 77 K. The distribution of Rs corresponded to that of the critical current density. Sampling of quality factors at each point was performed using non-contact measurement between film and sapphire. Since the airtight chamber was filled with dry N2 gas to avoid film degradation by frost and water during the warming process, perfect non-destructive measurement is realized. Fluctuation of distance between the surface of film and dielectric rod was monitored by resonance frequency. Errors in Rs caused by the fluctuation were calculated within ±0.01 mΩ. Furthermore, the system could detect a small (0.3 mm × 0.5 mm) scratch defect as well as the gradient of film thickness on Ag film. This technique is effective for inspection of large-area high temperature superconducting films for microwave applications.
| 元の言語 | 英語 |
|---|---|
| ページ（範囲） | 374-378 |
| ページ数 | 5 |
| ジャーナル | Physica C: Superconductivity and its applications |
| 巻 | 383 |
| 発行部数 | 4 |
| DOI | |
| 出版物ステータス | 出版済み - 1 1 2003 |
| 外部発表 | Yes |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering
これを引用
Demonstration of surface resistance mapping of large-area HTS films using the dielectric resonator method. / Kusunoki, M.; Takano, Y.; Nakamura, K.; Inadomaru, M.; Kosaka, D.; Nozaki, A.; Abe, S.; Yokoo, M.; Lorenz, M.; Hochmuth, H.; Mukaida, Masashi; Ohshima, S.
：: Physica C: Superconductivity and its applications, 巻 383, 番号 4, 01.01.2003, p. 374-378.研究成果: ジャーナルへの寄稿 › 記事
}
TY - JOUR
T1 - Demonstration of surface resistance mapping of large-area HTS films using the dielectric resonator method
AU - Kusunoki, M.
AU - Takano, Y.
AU - Nakamura, K.
AU - Inadomaru, M.
AU - Kosaka, D.
AU - Nozaki, A.
AU - Abe, S.
AU - Yokoo, M.
AU - Lorenz, M.
AU - Hochmuth, H.
AU - Mukaida, Masashi
AU - Ohshima, S.
PY - 2003/1/1
Y1 - 2003/1/1
N2 - A scanning mapping technique of surface resistance (Rs) using the sapphire dielectric resonator was developed and demonstrated for a 3-inch-diameter YBa2Cu3Oy film. The area of the 3-inch film was divided by 5 × 5 mm grid for scan, resulting in 101 measurement points. Values of Rs in the film varied from 2.9 to 3.8 mΩ at 22 GHz and 77 K. The distribution of Rs corresponded to that of the critical current density. Sampling of quality factors at each point was performed using non-contact measurement between film and sapphire. Since the airtight chamber was filled with dry N2 gas to avoid film degradation by frost and water during the warming process, perfect non-destructive measurement is realized. Fluctuation of distance between the surface of film and dielectric rod was monitored by resonance frequency. Errors in Rs caused by the fluctuation were calculated within ±0.01 mΩ. Furthermore, the system could detect a small (0.3 mm × 0.5 mm) scratch defect as well as the gradient of film thickness on Ag film. This technique is effective for inspection of large-area high temperature superconducting films for microwave applications.
AB - A scanning mapping technique of surface resistance (Rs) using the sapphire dielectric resonator was developed and demonstrated for a 3-inch-diameter YBa2Cu3Oy film. The area of the 3-inch film was divided by 5 × 5 mm grid for scan, resulting in 101 measurement points. Values of Rs in the film varied from 2.9 to 3.8 mΩ at 22 GHz and 77 K. The distribution of Rs corresponded to that of the critical current density. Sampling of quality factors at each point was performed using non-contact measurement between film and sapphire. Since the airtight chamber was filled with dry N2 gas to avoid film degradation by frost and water during the warming process, perfect non-destructive measurement is realized. Fluctuation of distance between the surface of film and dielectric rod was monitored by resonance frequency. Errors in Rs caused by the fluctuation were calculated within ±0.01 mΩ. Furthermore, the system could detect a small (0.3 mm × 0.5 mm) scratch defect as well as the gradient of film thickness on Ag film. This technique is effective for inspection of large-area high temperature superconducting films for microwave applications.
UR - http://www.scopus.com/inward/record.url?scp=0037216191&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0037216191&partnerID=8YFLogxK
U2 - 10.1016/S0921-4534(02)01347-3
DO - 10.1016/S0921-4534(02)01347-3
M3 - Article
AN - SCOPUS:0037216191
VL - 383
SP - 374
EP - 378
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
SN - 0921-4534
IS - 4
ER -