Demonstration of ultraprecision ductile-mode cutting for lithium niobate microring waveguides

Ryo Takigawa, Eiji Higurashi, Tetsuya Kawanishi, Tanemasa Asano

研究成果: ジャーナルへの寄稿記事

3 引用 (Scopus)

抄録

In this paper, the application of the ultraprecision ductile-mode cutting method to the fabrication of microring waveguides in lithium niobate crystal was investigated. Although it was difficult to apply a mechanical cutting method to the fabrication of microring waveguides with smooth sidewalls, it was confirmed that no harmful cutting traces on the machined surface occur with the appropriate movement of the cutting tool. The root-meansquare surface roughness of the resulting sidewall was 6.1 nm, which is sufficiently small to suppress the scattering loss of the circulating light. In addition, the conditions for the ductile-mode cutting of lithium niobate crystal were investigated.

元の言語英語
記事番号110304
ジャーナルJapanese Journal of Applied Physics
55
発行部数11
DOI
出版物ステータス出版済み - 11 1 2016

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lithium niobates
Waveguides
Lithium
Demonstrations
waveguides
Fabrication
Crystals
Cutting tools
fabrication
Surface roughness
crystals
Scattering
surface roughness
scattering

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Demonstration of ultraprecision ductile-mode cutting for lithium niobate microring waveguides. / Takigawa, Ryo; Higurashi, Eiji; Kawanishi, Tetsuya; Asano, Tanemasa.

:: Japanese Journal of Applied Physics, 巻 55, 番号 11, 110304, 01.11.2016.

研究成果: ジャーナルへの寄稿記事

Takigawa, Ryo ; Higurashi, Eiji ; Kawanishi, Tetsuya ; Asano, Tanemasa. / Demonstration of ultraprecision ductile-mode cutting for lithium niobate microring waveguides. :: Japanese Journal of Applied Physics. 2016 ; 巻 55, 番号 11.
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