Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

T. Shimogaki, T. Ofuji, M. Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, Tanemasa Asano, T. Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.

元の言語英語
ホスト出版物のタイトル2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOI
出版物ステータス出版済み - 10 18 2013
イベント10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, 日本
継続期間: 6 30 20137 4 2013

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

その他

その他10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
日本
Kyoto
期間6/30/137/4/13

Fingerprint

laser annealing
Excimer lasers
Nanorods
excimer lasers
nanorods
repetition
Annealing
Ions
Lasers
Light absorption
ions
optical absorption

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

これを引用

Shimogaki, T., Ofuji, T., Higashihata, M., Ikenoue, H., Nakamura, D., Asano, T., & Okada, T. (2013). Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600321] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600321

Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. / Shimogaki, T.; Ofuji, T.; Higashihata, M.; Ikenoue, Hiroshi; Nakamura, Daisuke; Asano, Tanemasa; Okada, T.

2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600321 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Shimogaki, T, Ofuji, T, Higashihata, M, Ikenoue, H, Nakamura, D, Asano, T & Okada, T 2013, Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600321, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, 日本, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600321
Shimogaki T, Ofuji T, Higashihata M, Ikenoue H, Nakamura D, Asano T その他. Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600321. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600321
Shimogaki, T. ; Ofuji, T. ; Higashihata, M. ; Ikenoue, Hiroshi ; Nakamura, Daisuke ; Asano, Tanemasa ; Okada, T. / Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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title = "Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser",
abstract = "P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.",
author = "T. Shimogaki and T. Ofuji and M. Higashihata and Hiroshi Ikenoue and Daisuke Nakamura and Tanemasa Asano and T. Okada",
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AU - Asano, Tanemasa

AU - Okada, T.

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