TY - GEN
T1 - Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser
AU - Shimogaki, T.
AU - Ofuji, T.
AU - Higashihata, M.
AU - Ikenoue, Hiroshi
AU - Nakamura, Daisuke
AU - Asano, Tanemasa
AU - Okada, T.
PY - 2013/10/18
Y1 - 2013/10/18
N2 - P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.
AB - P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.
UR - http://www.scopus.com/inward/record.url?scp=84885453092&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885453092&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2013.6600321
DO - 10.1109/CLEOPR.2013.6600321
M3 - Conference contribution
AN - SCOPUS:84885453092
SN - 9781467364751
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
T2 - 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Y2 - 30 June 2013 through 4 July 2013
ER -