Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

T. Shimogaki, T. Ofuji, M. Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, Tanemasa Asano, T. Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抜粋

P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.

元の言語英語
ホスト出版物のタイトル2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOI
出版物ステータス出版済み - 10 18 2013
イベント10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, 日本
継続期間: 6 30 20137 4 2013

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

その他

その他10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
日本
Kyoto
期間6/30/137/4/13

    フィンガープリント

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

これを引用

Shimogaki, T., Ofuji, T., Higashihata, M., Ikenoue, H., Nakamura, D., Asano, T., & Okada, T. (2013). Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600321] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600321