Deposition behavior of YSZ nano-coating layer by EB-PVD

Tae Ho Shin; Ji Heang Yu; Shiwoo Lee; In Sub Han; Sang Kuk Woo; Byung Koog Jang; Sang Hoon Hyun

Deposition behavior of YSZ nano-coating layer by EB-PVD

Tae Ho Shin, Ji Heang Yu, Shiwoo Lee, In Sub Han, Sang Kuk Woo, Byung Koog Jang, Sang Hoon Hyun

研究成果: Contribution to journal › Article › 査読

抄録

This paper presents the work on the development of ceramic coating processing. Nano-structured zirconia coating has been developed with functions; substrate temperature and oxygen gas change in chamber by electron beam physical vapor deposition (EB-PVD). The microstructure of the coating layer has been characterized with FE-SEM, and SEM. The crystalline phase of the coating layer has been also characterized with XRD. The zirconia coating by EB-PVD had not monoclinic zirconia phase as shown in XRD pattern and Raman spectra and the thickness of coating were quite homogeneous. The fracture microstructure of the coating layer for a thickness of ∼15 μm showed columnar or non-columnar structure and had nano-structure with nano scaled grain as shown in micrograph by FE-SEM.

本文言語	英語
ページ（範囲）	505-508
ページ数	4
ジャーナル	Key Engineering Materials
巻	317-318
出版ステータス	出版済み - 1 1 2006
外部発表	はい

All Science Journal Classification (ASJC) codes

材料科学（全般）
材料力学
機械工学

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title = "Deposition behavior of YSZ nano-coating layer by EB-PVD",

abstract = "This paper presents the work on the development of ceramic coating processing. Nano-structured zirconia coating has been developed with functions; substrate temperature and oxygen gas change in chamber by electron beam physical vapor deposition (EB-PVD). The microstructure of the coating layer has been characterized with FE-SEM, and SEM. The crystalline phase of the coating layer has been also characterized with XRD. The zirconia coating by EB-PVD had not monoclinic zirconia phase as shown in XRD pattern and Raman spectra and the thickness of coating were quite homogeneous. The fracture microstructure of the coating layer for a thickness of ∼15 μm showed columnar or non-columnar structure and had nano-structure with nano scaled grain as shown in micrograph by FE-SEM.",

author = "Shin, {Tae Ho} and Yu, {Ji Heang} and Shiwoo Lee and Han, {In Sub} and Woo, {Sang Kuk} and Jang, {Byung Koog} and Hyun, {Sang Hoon}",

year = "2006",

month = jan,

day = "1",

language = "English",

volume = "317-318",

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journal = "Key Engineering Materials",

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TY - JOUR

T1 - Deposition behavior of YSZ nano-coating layer by EB-PVD

AU - Shin, Tae Ho

AU - Yu, Ji Heang

AU - Lee, Shiwoo

AU - Han, In Sub

AU - Woo, Sang Kuk

AU - Jang, Byung Koog

AU - Hyun, Sang Hoon

PY - 2006/1/1

Y1 - 2006/1/1

N2 - This paper presents the work on the development of ceramic coating processing. Nano-structured zirconia coating has been developed with functions; substrate temperature and oxygen gas change in chamber by electron beam physical vapor deposition (EB-PVD). The microstructure of the coating layer has been characterized with FE-SEM, and SEM. The crystalline phase of the coating layer has been also characterized with XRD. The zirconia coating by EB-PVD had not monoclinic zirconia phase as shown in XRD pattern and Raman spectra and the thickness of coating were quite homogeneous. The fracture microstructure of the coating layer for a thickness of ∼15 μm showed columnar or non-columnar structure and had nano-structure with nano scaled grain as shown in micrograph by FE-SEM.

AB - This paper presents the work on the development of ceramic coating processing. Nano-structured zirconia coating has been developed with functions; substrate temperature and oxygen gas change in chamber by electron beam physical vapor deposition (EB-PVD). The microstructure of the coating layer has been characterized with FE-SEM, and SEM. The crystalline phase of the coating layer has been also characterized with XRD. The zirconia coating by EB-PVD had not monoclinic zirconia phase as shown in XRD pattern and Raman spectra and the thickness of coating were quite homogeneous. The fracture microstructure of the coating layer for a thickness of ∼15 μm showed columnar or non-columnar structure and had nano-structure with nano scaled grain as shown in micrograph by FE-SEM.

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JO - Key Engineering Materials

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Deposition behavior of YSZ nano-coating layer by EB-PVD

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