抄録
This paper presents the work on the development of ceramic coating processing. Nano-structured zirconia coating has been developed with functions; substrate temperature and oxygen gas change in chamber by electron beam physical vapor deposition (EB-PVD). The microstructure of the coating layer has been characterized with FE-SEM, and SEM. The crystalline phase of the coating layer has been also characterized with XRD. The zirconia coating by EB-PVD had not monoclinic zirconia phase as shown in XRD pattern and Raman spectra and the thickness of coating were quite homogeneous. The fracture microstructure of the coating layer for a thickness of ∼15 μm showed columnar or non-columnar structure and had nano-structure with nano scaled grain as shown in micrograph by FE-SEM.
本文言語 | 英語 |
---|---|
ページ(範囲) | 505-508 |
ページ数 | 4 |
ジャーナル | Key Engineering Materials |
巻 | 317-318 |
出版ステータス | 出版済み - 1月 1 2006 |
外部発表 | はい |
!!!All Science Journal Classification (ASJC) codes
- 材料科学(全般)
- 材料力学
- 機械工学