抄録
We report here deposition of crystalline Ge nanoparticle films using a radio frequency magnetron sputtering method in argon and hydrogen gas mixture under a high pressure condition. The size of Ge nanoparticles is deduced to be 6.3-6.4 nm from the peak frequency shift of Raman spectra. Raman and X-ray diffraction spectra show that the films are crystalline. The film crystallinity strongly depends on substrate temperature (Ts). Highly crystalline Ge nanoparticle films are successfully fabricated at Ts 180°C.
| 元の言語 | 英語 |
|---|---|
| 記事番号 | 012002 |
| ジャーナル | Journal of Physics: Conference Series |
| 巻 | 518 |
| 発行部数 | 1 |
| DOI | |
| 出版物ステータス | 出版済み - 1 1 2014 |
| イベント | 26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, 日本 継続期間: 9 23 2013 → 9 24 2013 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
これを引用
Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method. / Ichida, D.; Uchida, G.; Seo, H.; Kamataki, K.; Itagaki, N.; Koga, K.; Shiratani, M.
：: Journal of Physics: Conference Series, 巻 518, 番号 1, 012002, 01.01.2014.研究成果: ジャーナルへの寄稿 › Conference article
}
TY - JOUR
T1 - Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method
AU - Ichida, D.
AU - Uchida, G.
AU - Seo, H.
AU - Kamataki, K.
AU - Itagaki, N.
AU - Koga, K.
AU - Shiratani, M.
PY - 2014/1/1
Y1 - 2014/1/1
N2 - We report here deposition of crystalline Ge nanoparticle films using a radio frequency magnetron sputtering method in argon and hydrogen gas mixture under a high pressure condition. The size of Ge nanoparticles is deduced to be 6.3-6.4 nm from the peak frequency shift of Raman spectra. Raman and X-ray diffraction spectra show that the films are crystalline. The film crystallinity strongly depends on substrate temperature (Ts). Highly crystalline Ge nanoparticle films are successfully fabricated at Ts 180°C.
AB - We report here deposition of crystalline Ge nanoparticle films using a radio frequency magnetron sputtering method in argon and hydrogen gas mixture under a high pressure condition. The size of Ge nanoparticles is deduced to be 6.3-6.4 nm from the peak frequency shift of Raman spectra. Raman and X-ray diffraction spectra show that the films are crystalline. The film crystallinity strongly depends on substrate temperature (Ts). Highly crystalline Ge nanoparticle films are successfully fabricated at Ts 180°C.
UR - http://www.scopus.com/inward/record.url?scp=84903471907&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84903471907&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/518/1/012002
DO - 10.1088/1742-6596/518/1/012002
M3 - Conference article
AN - SCOPUS:84903471907
VL - 518
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012002
ER -