Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

Masanori Shinohara, Taisuke Tominaga, Hayato Shimomura, Takeshi Ihara, Yoshihito Yagyu, Tamiko Ohshima, Hiroharu Kawasaki

研究成果: Contribution to journalArticle査読

抄録

A hydrophilic amorphous carbon film was deposited with plasma-enhanced chemical vapor deposition using diisopropylether ((i-C 3 H 7 ) 2 O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp 3 -hydrocarbon components, which is the same as the isopropyl group in the source molecule. On the other hand, C═O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C─O─C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

本文言語英語
ページ(範囲)3-9
ページ数7
ジャーナルElectronics and Communications in Japan
102
4
DOI
出版ステータス出版済み - 4 2019
外部発表はい

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Applied Mathematics

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