Design and fabrication of driving microcoil with large tilt-angle for medical scanner application

Bin Sun, Renshi Sawada, Zhuoqing Yang, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    5 被引用数 (Scopus)

    抄録

    This paper presents an electromagnetically-actuated single optical fiber scanner that utilizes its high-order resonance modal and tilt microcoil to realize a larger scanning angle. The device is fabricated on the surface of a thin polymer tube with 1mm diameter by our developed spray coating and cylindrical projection lithography systems, which could be used as ultra-thin medical endoscope. In order to realize the electromagnetically-driven scanning, a cylindrical magnet is fixed at the center of the polyimide pipe by an optical fiber. When an AC power is supplied to the microcoil, the fiber scanner is actuated under a certain frequency. The modal and dynamic response of the designed scanner under high-order vibration has been simulated and analyzed. The microcoil with 60° tilt angle is fabricated by wet etching and maskless electroplating processes. The electromagnetic property and maximum driven displacement of the fabricated device have been also evaluated, which is generally in accordance with that simulated. Finally, the electroplated microcoil of 60° tilt-angle, 40μm line width, 40μm line spacing and 15μm thickness has been obtained successfully.

    本文言語英語
    ホスト出版物のタイトルDTIP 2014 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
    出版社Institute of Electrical and Electronics Engineers Inc.
    ISBN(電子版)9782355000287
    DOI
    出版ステータス出版済み - 3 9 2014
    イベント2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2014 - Cannes, フランス
    継続期間: 4 2 20144 4 2014

    出版物シリーズ

    名前DTIP 2014 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

    その他

    その他2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2014
    国/地域フランス
    CityCannes
    Period4/2/144/4/14

    All Science Journal Classification (ASJC) codes

    • コンピュータ グラフィックスおよびコンピュータ支援設計
    • コンピュータ サイエンスの応用
    • ハードウェアとアーキテクチャ

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