Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

M. Nakada, K. Takahashi, A. Higo, H. Fujita, H. Toshiyoshi

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抜粋

We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

元の言語英語
ホスト出版物のタイトル2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
ページ48-49
ページ数2
DOI
出版物ステータス出版済み - 2008
イベント2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, ドイツ
継続期間: 8 11 20088 14 2008

出版物シリーズ

名前2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

その他

その他2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
ドイツ
Freiburg
期間8/11/088/14/08

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • これを引用

    Nakada, M., Takahashi, K., Higo, A., Fujita, H., & Toshiyoshi, H. (2008). Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. : 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS (pp. 48-49). [4607822] (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS). https://doi.org/10.1109/OMEMS.2008.4607822