抄録
We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
元の言語 | 英語 |
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ホスト出版物のタイトル | 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS |
ページ | 48-49 |
ページ数 | 2 |
DOI | |
出版物ステータス | 出版済み - 2008 |
外部発表 | Yes |
イベント | 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, ドイツ 継続期間: 8 11 2008 → 8 14 2008 |
その他
その他 | 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS |
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国 | ドイツ |
市 | Freiburg |
期間 | 8/11/08 → 8/14/08 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
これを引用
Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. / Nakada, M.; Takahashi, Koji; Higo, A.; Fujita, H.; Toshiyoshi, H.
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. p. 48-49 4607822.研究成果: 著書/レポートタイプへの貢献 › 会議での発言
}
TY - GEN
T1 - Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application
AU - Nakada, M.
AU - Takahashi, Koji
AU - Higo, A.
AU - Fujita, H.
AU - Toshiyoshi, H.
PY - 2008
Y1 - 2008
N2 - We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
AB - We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
UR - http://www.scopus.com/inward/record.url?scp=54049119314&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=54049119314&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2008.4607822
DO - 10.1109/OMEMS.2008.4607822
M3 - Conference contribution
AN - SCOPUS:54049119314
SN - 9781424419180
SP - 48
EP - 49
BT - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
ER -