Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

M. Nakada, Koji Takahashi, A. Higo, H. Fujita, H. Toshiyoshi

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

元の言語英語
ホスト出版物のタイトル2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
ページ48-49
ページ数2
DOI
出版物ステータス出版済み - 2008
外部発表Yes
イベント2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, ドイツ
継続期間: 8 11 20088 14 2008

その他

その他2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
ドイツ
Freiburg
期間8/11/088/14/08

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Endoscopy
MEMS
Fabrication
Chemical stability
Elastic constants
Chemical vapor deposition
Electrostatics
Electric potential

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

これを引用

Nakada, M., Takahashi, K., Higo, A., Fujita, H., & Toshiyoshi, H. (2008). Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. : 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS (pp. 48-49). [4607822] https://doi.org/10.1109/OMEMS.2008.4607822

Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. / Nakada, M.; Takahashi, Koji; Higo, A.; Fujita, H.; Toshiyoshi, H.

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. p. 48-49 4607822.

研究成果: 著書/レポートタイプへの貢献会議での発言

Nakada, M, Takahashi, K, Higo, A, Fujita, H & Toshiyoshi, H 2008, Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. : 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS., 4607822, pp. 48-49, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, Freiburg, ドイツ, 8/11/08. https://doi.org/10.1109/OMEMS.2008.4607822
Nakada M, Takahashi K, Higo A, Fujita H, Toshiyoshi H. Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. : 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. p. 48-49. 4607822 https://doi.org/10.1109/OMEMS.2008.4607822
Nakada, M. ; Takahashi, Koji ; Higo, A. ; Fujita, H. ; Toshiyoshi, H. / Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. pp. 48-49
@inproceedings{c368b11780984184abfde76ba5fd836e,
title = "Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application",
abstract = "We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.",
author = "M. Nakada and Koji Takahashi and A. Higo and H. Fujita and H. Toshiyoshi",
year = "2008",
doi = "10.1109/OMEMS.2008.4607822",
language = "English",
isbn = "9781424419180",
pages = "48--49",
booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",

}

TY - GEN

T1 - Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

AU - Nakada, M.

AU - Takahashi, Koji

AU - Higo, A.

AU - Fujita, H.

AU - Toshiyoshi, H.

PY - 2008

Y1 - 2008

N2 - We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

AB - We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

UR - http://www.scopus.com/inward/record.url?scp=54049119314&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=54049119314&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2008.4607822

DO - 10.1109/OMEMS.2008.4607822

M3 - Conference contribution

AN - SCOPUS:54049119314

SN - 9781424419180

SP - 48

EP - 49

BT - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

ER -