Detailed gas phase chemistry in CVD of carbon from unsaturated light hydrocarbons

Koyo Norinaga, Olaf Deutschmann

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

2 被引用数 (Scopus)

抄録

An in-pore CVD of carbon, i.e., chemical vapor infiltration (CVI) is widely used to produce C/C composites. For the optimization of the process, it is important to understand the CVD of carbon at the level of elementary reactions. In this study, a model was developed to simulate complex gas phase reactions proceeding in CVD of carbon from unsaturated light hydrocarbons (C 2H4, C2H2, and C3H 6) by using a software package for computing time-dependent homogenous reaction systems. CVD experiments were performed with a vertical up-flow reactor at a temperature of 900°C, pressure ranging from 2 to 15 kPa, residence times up to 2 s, and a substrate surface area/volume ratio of 3.2 mm-1. Gas phase components were analyzed by both on-line and ex-situ GC with good material balances of more than 90 %. The model which involves 230 species and 757 reactions can predict the profiles of 30 gas phase components from hydrogen to coronene (C24H12) with an acceptable level of accuracy.

本文言語英語
ホスト出版物のタイトルEUROCVD-15: Fifteenth European Conference on Chemical Vapor Deposition
編集者A. Devi, R. Fischer, H. Parala, M.D. Allendorf, M. Hitchman
ページ348-355
ページ数8
PV 2005-09
出版ステータス出版済み - 2005
外部発表はい
イベント15th European Conference on Chemical Vapor Deposition, EUROCVD-15 - Bochum, ドイツ
継続期間: 9 5 20059 9 2005

その他

その他15th European Conference on Chemical Vapor Deposition, EUROCVD-15
Countryドイツ
CityBochum
Period9/5/059/9/05

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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