Detection methods of diamond diffraction peaks in ultrananocrystalline diamond/amorphous carbon composite films by X-ray diffraction measurement with semiconductor counter detector

Takeshi Hara, Yoshihiro Nojiri, Kenji Hanada, Tsuyoshi Yoshitake

    研究成果: Contribution to journalArticle査読

    2 被引用数 (Scopus)

    抄録

    Ultrananocrystalline diamond (UNCD)/amorphous carbon (a-C) composite films were fabricated by a coaxial arc plasma deposition (CAPD) method. Hereafter, UNCD with crystallite diameters of less than 10nm in an a-C matrix could only be unambiguously detected by powder X-ray diffraction measurement using a synchrotron radiation source (SR-XRD) or transmission electron microscopy (TEM) observation. In this study, we succeeded in detecting diffraction peaks due to diamond-111 in the film by X-ray diffraction (XRD) using a Cu-K? radiation source with a semiconductor counter detector. The obtained data were in agreement with the powder SR-XRD measurements of the deposited films.

    本文言語英語
    論文番号108002
    ジャーナルJapanese journal of applied physics
    54
    10
    DOI
    出版ステータス出版済み - 10 1 2015

    All Science Journal Classification (ASJC) codes

    • 工学(全般)
    • 物理学および天文学(全般)

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