We carried out polarized neutron reflectivity (PNR) analysis to determine the fine magnetic structure of magnetic multilayers with quasi-antiferromagnetic (quasi-AFM) layers realized by 90-deg coupling using two Co90Fe10 layers, and quantitatively evaluated the magnetization of quasi-AFM layers. Two types of samples with different buffer layers, Ru buffer and a NiFeCr buffer, were investigated and the average angles between the respective magnetization of the two Co90Fe10 layers were estimated to be +/- 39 degrees and +/- 53 degrees. In addition, less roughness was found in the NiFeCr buffer sample resulting stronger 90-deg coupling. A perfect quasi-AFM is expected to be realized by a flat interface of the magnetic multilayer.
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