Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

K. Maehata, N. Iyomoto, M. Maeda, S. Ezaki, A. Takano, S. Matsumura, T. Hara, K. Mitsuda, N. Y. Yamasaki, K. Tanaka

研究成果: ジャーナルへの寄稿記事

2 引用 (Scopus)

抄録

A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

元の言語英語
ページ(範囲)578-583
ページ数6
ジャーナルJournal of Low Temperature Physics
176
発行部数3-4
DOI
出版物ステータス出版済み - 8 2014

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calorimeters
absorbers
Pixels
pixels
sensors
Sensors
Full width at half maximum
stems
Energy dispersive spectroscopy
Electron microscopes
electron microscopes
X rays
energy
spectroscopy
x rays

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

これを引用

Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions. / Maehata, K.; Iyomoto, N.; Maeda, M.; Ezaki, S.; Takano, A.; Matsumura, S.; Hara, T.; Mitsuda, K.; Yamasaki, N. Y.; Tanaka, K.

:: Journal of Low Temperature Physics, 巻 176, 番号 3-4, 08.2014, p. 578-583.

研究成果: ジャーナルへの寄稿記事

Maehata, K. ; Iyomoto, N. ; Maeda, M. ; Ezaki, S. ; Takano, A. ; Matsumura, S. ; Hara, T. ; Mitsuda, K. ; Yamasaki, N. Y. ; Tanaka, K. / Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions. :: Journal of Low Temperature Physics. 2014 ; 巻 176, 番号 3-4. pp. 578-583.
@article{3abfb297028d4a2ab362840484a12f69,
title = "Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions",
abstract = "A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.",
author = "K. Maehata and N. Iyomoto and M. Maeda and S. Ezaki and A. Takano and S. Matsumura and T. Hara and K. Mitsuda and Yamasaki, {N. Y.} and K. Tanaka",
year = "2014",
month = "8",
doi = "10.1007/s10909-014-1113-9",
language = "English",
volume = "176",
pages = "578--583",
journal = "Journal of Low Temperature Physics",
issn = "0022-2291",
publisher = "Springer New York",
number = "3-4",

}

TY - JOUR

T1 - Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

AU - Maehata, K.

AU - Iyomoto, N.

AU - Maeda, M.

AU - Ezaki, S.

AU - Takano, A.

AU - Matsumura, S.

AU - Hara, T.

AU - Mitsuda, K.

AU - Yamasaki, N. Y.

AU - Tanaka, K.

PY - 2014/8

Y1 - 2014/8

N2 - A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

AB - A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

UR - http://www.scopus.com/inward/record.url?scp=84904049083&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84904049083&partnerID=8YFLogxK

U2 - 10.1007/s10909-014-1113-9

DO - 10.1007/s10909-014-1113-9

M3 - Article

AN - SCOPUS:84904049083

VL - 176

SP - 578

EP - 583

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

SN - 0022-2291

IS - 3-4

ER -