Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

K. Maehata, N. Iyomoto, M. Maeda, S. Ezaki, A. Takano, S. Matsumura, T. Hara, K. Mitsuda, N. Y. Yamasaki, K. Tanaka

研究成果: ジャーナルへの寄稿学術誌査読

2 被引用数 (Scopus)

抄録

A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

本文言語英語
ページ(範囲)578-583
ページ数6
ジャーナルJournal of Low Temperature Physics
176
3-4
DOI
出版ステータス出版済み - 8月 2014

!!!All Science Journal Classification (ASJC) codes

  • 原子分子物理学および光学
  • 材料科学(全般)
  • 凝縮系物理学

フィンガープリント

「Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル