TY - JOUR
T1 - Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources
AU - Tomita, Kentaro
AU - Sato, Yuta
AU - Nishikawa, Kazutaka
AU - Uchino, Kiichiro
AU - Yanagida, Tatsuya
AU - Tomuro, Hiroaki
AU - Wada, Yasunori
AU - Kunishima, Masahito
AU - Kodama, Takeshi
AU - Mizoguchi, Hakaru
AU - Sunahara, Atsushi
N1 - Publisher Copyright:
© 2015 The Japan Society of Applied Physics.
PY - 2015/12
Y1 - 2015/12
N2 - Spatial profiles of electron density (ne) and electron temperature (Te) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18pm spectral resolution, a 5 ns temporal resolution, a 50 μm spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 1023 < ne < 1025m-3 and 10 < Te < 20 eV have been performed.
AB - Spatial profiles of electron density (ne) and electron temperature (Te) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18pm spectral resolution, a 5 ns temporal resolution, a 50 μm spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 1023 < ne < 1025m-3 and 10 < Te < 20 eV have been performed.
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U2 - 10.7567/APEX.8.126101
DO - 10.7567/APEX.8.126101
M3 - Article
AN - SCOPUS:84948808009
SN - 1882-0778
VL - 8
JO - Applied Physics Express
JF - Applied Physics Express
IS - 12
M1 - 126101
ER -