Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements

Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Eiji Higurashi, Renshi Sawada

研究成果: Contribution to journalArticle

2 引用 (Scopus)

抜粋

We fabricated a mechanical stage driven by a piezoelectric actuator and built in a microdisplacement sensor, which is used to decrease the effect of hysteresis and creep in the piezoelectric actuator. The displacement sensor consists of a vertical-cavity surface-emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame, and a cover glass. The size of the sensor chip is 3.0 mm by 3.0 mm with a thickness of 0.7 mm. The maximum variation in the position of the mechanical stage caused by hysteresis is 7.5 μm without control when the movement range of the mechanical stage is 84.4 μm. By controlling the applied voltage using our microdisplacement sensor, we reduce the effect of the hysteresis, and the variation in position decreased to 1.9 μm.

元の言語英語
ページ(範囲)547-557
ページ数11
ジャーナルSensors and Materials
26
発行部数8
出版物ステータス出版済み - 1 1 2014

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Science(all)

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    Takeshita, T., Iwasaki, T., Harisaki, K., Ando, H., Higurashi, E., & Sawada, R. (2014). Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements. Sensors and Materials, 26(8), 547-557.