Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Narumi Tokuoh, Mitsuyoshi Fukuda

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

2 被引用数 (Scopus)

抄録

This paper has described a system for measuring 3-D micro structures using an optical fiber probe. For this research, the stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique. Further, the minimum diameter of the available stylus shaft was examined using an FDTD method. Finally, the stylus characteristic and the measurement resolution were examined. As a result, it was shown by an FDTD simulation that the minimum diameter of the available stylus shaft was about 0.2 μm for a laser diode with a 375 nm wavelength. In addition, the stylus shaft with a diameter of 0.4 μm could be manufactured, and the resolution of the measurement system using this shaft was found to be approximately 5 nm.

本文言語英語
ホスト出版物のタイトルProceedings - ASPE 2014 Annual Meeting
出版社American Society for Precision Engineering, ASPE
ページ63-66
ページ数4
ISBN(電子版)9781887706667
出版ステータス出版済み - 2014
イベント29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014 - Boston, 米国
継続期間: 11月 9 201411月 14 2014

出版物シリーズ

名前Proceedings - ASPE 2014 Annual Meeting

その他

その他29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014
国/地域米国
CityBoston
Period11/9/1411/14/14

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)

フィンガープリント

「Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル