Development of a TES microcalorimeter with a mushroom shaped absorber deposited on an Insulating Layer in an Overhang Region

K. Maehata, N. Iyomoto, T. Yasumune, M. Maeda, S. Matsumura, T. Hara, K. Mitsuda, N. Yamasaki, K. Tanaka

研究成果: ジャーナルへの寄稿学術誌査読

1 被引用数 (Scopus)

抄録

A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter- array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 μm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 μm × 350 μm and 330 μm × 330 μm, respectively. The absorber stem of 150 μm × 150 μm in the cross sectional area is deposited on the center of the TES surface. A Ta2O5 insulating layer of 0.1 μm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an 55Fe source.

本文言語英語
ページ(範囲)226-231
ページ数6
ジャーナルJournal of Low Temperature Physics
167
3-4
DOI
出版ステータス出版済み - 6月 2012

!!!All Science Journal Classification (ASJC) codes

  • 原子分子物理学および光学
  • 材料科学(全般)
  • 凝縮系物理学

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