Development of an energy dispersive spectrometer for a transmission electron microscope utilizing a TES microcalorimeter array

Keiichi Tanaka, Kazuhisa Mitsuda, Tom Hara, Keisuke Maehata, Noriko Y. Yamasaki, Akikazu Odawara, Atsushi Nagata, Katsuaki Watanabe, Yoh Takei

研究成果: 著書/レポートタイプへの貢献会議での発言

5 引用 (Scopus)

抜粋

A high-energy-resolution energy dispersive spectrometer (EDS) utilizing a TES (transition edge sensor) microcalorimeter array is developed for a transmission electron microscope (TEM). The goals of the development are (1) an energy range of 0.3 - 10 keV, (2) an energy resolution of FWHM < 10 eV, (3) a maximum counting rate of 3 kcps, and (4) a cryogen-free cooling system. We adopted a dilution refrigerator (DR) pre-cooled by a Gifford-McMahon (GM) refrigerator to cool the TES microcalorimeter to -∼ 100 mK. In order to avoid micro phonics of GM fridge to propagate to the TEM, pressurized He gas is circulated between the DR and the GM to reject heat from the DR. The GM is mechanically well isolated from the TEM. In oder to obtain 3 kcps counting rate, we utilize a ten pixel TES array and read out the signals in parallel wtih ten analog signal channels from cryogenic to room temperature electronics. One of the pixels can be always irradiated by a radio isotope for energy calibration. As the first step, we have attached a single pixel TES system cooled by the cryogen-free cooling system to the TEM and obtained an energy resolution of 8 eV at 1.8 keV without degrading the spatial resolution of the TEM at a 2 Å level. A ten pixel TES system is also being developed from the front-end detector assembly to the room temperature digital electronics. We describe the signal processing system and packaging of the detector assembly.

元の言語英語
ホスト出版物のタイトルLow Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop
ページ715-718
ページ数4
DOI
出版物ステータス出版済み - 12 1 2009
イベント13th International Workshop on Low Temperature Detectors, LTD-13 - Stanford, CA, 米国
継続期間: 7 20 20097 24 2009

出版物シリーズ

名前AIP Conference Proceedings
1185
ISSN(印刷物)0094-243X
ISSN(電子版)1551-7616

その他

その他13th International Workshop on Low Temperature Detectors, LTD-13
米国
Stanford, CA
期間7/20/097/24/09

    フィンガープリント

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

これを引用

Tanaka, K., Mitsuda, K., Hara, T., Maehata, K., Yamasaki, N. Y., Odawara, A., ... Takei, Y. (2009). Development of an energy dispersive spectrometer for a transmission electron microscope utilizing a TES microcalorimeter array. : Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop (pp. 715-718). (AIP Conference Proceedings; 巻数 1185). https://doi.org/10.1063/1.3292441