Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption

Takane Kobayashi, Atsushi Kamoshida, Hideo Akiyama, Ken Watanabe, Tsuyoshi Ohnishi, Kazunori Takada, Taku T. Suzuki

研究成果: Contribution to journalArticle査読

2 被引用数 (Scopus)

抄録

A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.

本文言語英語
論文番号106601
ジャーナルApplied Physics Express
7
10
DOI
出版ステータス出版済み - 10 1 2014
外部発表はい

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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