Development of new oxygen sensor by microfabrication of single-crystal CuFeTe2 thin films

Masatoshi Kozaki, Yuichiro Higuchi, Akihiro Ikeda, Hisao Kuriyaki, Kiyoshi Toko

研究成果: ジャーナルへの寄稿記事

3 引用 (Scopus)

抜粋

A new oxygen sensor based on resistance change caused by oxygen intercalation for the layered compound CuFeTe2 (CFT) was developed. A microfabrication process for forming many fine pores on the surface of single-crystal CFT thin films by performing wet etching using photolithography was developed with the aim of reducing the response time of the oxygen sensor. A reproducible response of the fabricated samples to oxygen gas was confirmed when 20% oxygen gas and nitrogen gas were alternately introduced into the sample chamber. The microfabricated sample of the single-crystal CFT thin films showed a response time of 2.5 min to 20% oxygen gas, approximately 34% of that of the single-crystal CFT thin films without fine pores.

元の言語英語
ページ(範囲)471-477
ページ数7
ジャーナルSensors and Materials
25
発行部数7
出版物ステータス出版済み - 10 21 2013

    フィンガープリント

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Science(all)

これを引用

Kozaki, M., Higuchi, Y., Ikeda, A., Kuriyaki, H., & Toko, K. (2013). Development of new oxygen sensor by microfabrication of single-crystal CuFeTe2 thin films. Sensors and Materials, 25(7), 471-477.