Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

Reiho Amano, Thanh Hung Dinh, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Kenichiro Nanto, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Tetsuya Makimura, Taisuke Miura, Akira Endo, Tomas Mocek, Padraig Dunne, Gerry O'Sullivan, Takeshi Higashiguchi

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.

元の言語英語
ホスト出版物のタイトル2015 IEEE Photonics Conference, IPC 2015
出版者Institute of Electrical and Electronics Engineers Inc.
ページ78-79
ページ数2
ISBN(電子版)9781479974658
DOI
出版物ステータス出版済み - 11 9 2015
イベントIEEE Photonics Conference, IPC 2015 - Reston, 米国
継続期間: 8 30 20158 31 2015

出版物シリーズ

名前2015 IEEE Photonics Conference, IPC 2015

その他

その他IEEE Photonics Conference, IPC 2015
米国
Reston
期間8/30/158/31/15

Fingerprint

Rare earth elements
Rare earths
Laser pulses
Plasmas

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

これを引用

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Fujii, Y., Nanto, K., ... Higashiguchi, T. (2015). Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources. : 2015 IEEE Photonics Conference, IPC 2015 (pp. 78-79). [7323554] (2015 IEEE Photonics Conference, IPC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPCon.2015.7323554

Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources. / Amano, Reiho; Dinh, Thanh Hung; Sasanuma, Atsushi; Arai, Goki; Fujii, Yusuke; Nanto, Kenichiro; Takahashi, Akihiko; Nakamura, Daisuke; Okada, Tatsuo; Makimura, Tetsuya; Miura, Taisuke; Endo, Akira; Mocek, Tomas; Dunne, Padraig; O'Sullivan, Gerry; Higashiguchi, Takeshi.

2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 78-79 7323554 (2015 IEEE Photonics Conference, IPC 2015).

研究成果: 著書/レポートタイプへの貢献会議での発言

Amano, R, Dinh, TH, Sasanuma, A, Arai, G, Fujii, Y, Nanto, K, Takahashi, A, Nakamura, D, Okada, T, Makimura, T, Miura, T, Endo, A, Mocek, T, Dunne, P, O'Sullivan, G & Higashiguchi, T 2015, Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources. : 2015 IEEE Photonics Conference, IPC 2015., 7323554, 2015 IEEE Photonics Conference, IPC 2015, Institute of Electrical and Electronics Engineers Inc., pp. 78-79, IEEE Photonics Conference, IPC 2015, Reston, 米国, 8/30/15. https://doi.org/10.1109/IPCon.2015.7323554
Amano R, Dinh TH, Sasanuma A, Arai G, Fujii Y, Nanto K その他. Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources. : 2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 78-79. 7323554. (2015 IEEE Photonics Conference, IPC 2015). https://doi.org/10.1109/IPCon.2015.7323554
Amano, Reiho ; Dinh, Thanh Hung ; Sasanuma, Atsushi ; Arai, Goki ; Fujii, Yusuke ; Nanto, Kenichiro ; Takahashi, Akihiko ; Nakamura, Daisuke ; Okada, Tatsuo ; Makimura, Tetsuya ; Miura, Taisuke ; Endo, Akira ; Mocek, Tomas ; Dunne, Padraig ; O'Sullivan, Gerry ; Higashiguchi, Takeshi. / Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources. 2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 78-79 (2015 IEEE Photonics Conference, IPC 2015).
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