Development of the nano-probe system based on the laser-trapping technique

M. Michihata, Y. Takaya, T. Hayashi

研究成果: Contribution to journalArticle

55 引用 (Scopus)

抜粋

A nano-coordinate measuring machine (CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of (10 mm)3. To meet these stringent requirements, a laser-trapping probe is employed as a nano-sensing probe. This paper describes the development of the nano-CMM system with a laser-trapping probe and describes the performance of the probe via an assessment of the flatness and microsphere. It is observed that the laser-trapping probe can sense three-dimensional objects with a repeatability of 32 nm. Using the nano-CMM, the measurement uncertainty is estimated to be 335 nm (k = 2).

元の言語英語
ページ(範囲)493-496
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
57
発行部数1
DOI
出版物ステータス出版済み - 5 9 2008
外部発表Yes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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