Development of touch probing system using a fiber stylus

Hiroshi Murakami, Akio Katsuki, Takao Sajima

研究成果: ジャーナルへの寄稿記事

2 引用 (Scopus)

抄録

This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 μm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 μm in diameter and 475 μm in depth.

元の言語英語
記事番号24
ジャーナルFibers
4
発行部数3
DOI
出版物ステータス出版済み - 9 1 2016

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Ray tracing
Fibers
Optical systems
Optical fibers

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Civil and Structural Engineering
  • Biomaterials
  • Mechanics of Materials

これを引用

Development of touch probing system using a fiber stylus. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao.

:: Fibers, 巻 4, 番号 3, 24, 01.09.2016.

研究成果: ジャーナルへの寄稿記事

Murakami, Hiroshi ; Katsuki, Akio ; Sajima, Takao. / Development of touch probing system using a fiber stylus. :: Fibers. 2016 ; 巻 4, 番号 3.
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