Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source

Atsushi Matsumoto, Hiroki Tanaka, Kouji Akinaga, Akihiko Takahashi, Tatsuo Okada

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.

本文言語英語
ホスト出版物のタイトルPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
ページ1500-1501
ページ数2
DOI
出版ステータス出版済み - 12 1 2005
イベントPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, 日本
継続期間: 7 11 20057 15 2005

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
2005

その他

その他Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Country日本
CityTokyo
Period7/11/057/15/05

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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