Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source

Atsushi Matsumoto, Hiroki Tanaka, Kouji Akinaga, Akihiko Takahashi, Tatsuo Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.

元の言語英語
ホスト出版物のタイトルPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
ページ1500-1501
ページ数2
DOI
出版物ステータス出版済み - 12 1 2005
イベントPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, 日本
継続期間: 7 11 20057 15 2005

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
2005

その他

その他Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
日本
Tokyo
期間7/11/057/15/05

Fingerprint

neutral particles
Rayleigh scattering
electromagnetic absorption
laser plasmas
ultraviolet radiation
laser induced fluorescence
light sources
kinetics
spectroscopy

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

これを引用

Matsumoto, A., Tanaka, H., Akinaga, K., Takahashi, A., & Okada, T. (2005). Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source. : Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 (pp. 1500-1501). [1569794] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 巻数 2005). https://doi.org/10.1109/CLEOPR.2005.1569794

Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source. / Matsumoto, Atsushi; Tanaka, Hiroki; Akinaga, Kouji; Takahashi, Akihiko; Okada, Tatsuo.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. p. 1500-1501 1569794 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 巻 2005).

研究成果: 著書/レポートタイプへの貢献会議での発言

Matsumoto, A, Tanaka, H, Akinaga, K, Takahashi, A & Okada, T 2005, Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source. : Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005., 1569794, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 巻. 2005, pp. 1500-1501, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005, Tokyo, 日本, 7/11/05. https://doi.org/10.1109/CLEOPR.2005.1569794
Matsumoto A, Tanaka H, Akinaga K, Takahashi A, Okada T. Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source. : Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. p. 1500-1501. 1569794. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2005.1569794
Matsumoto, Atsushi ; Tanaka, Hiroki ; Akinaga, Kouji ; Takahashi, Akihiko ; Okada, Tatsuo. / Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source. Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. pp. 1500-1501 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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