Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source

D. Nakamura, K. Okazaki, T. Akiyama, K. Toya, A. Takahashi, T. Okada, T. Yanagida, Y. Ueno, Y. Sasaki, T. Suganuma, M. Nakano, H. Komori, A. Sumitani, A. Endo

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

The ablation dynamics of tin micro-droplet target irradiated by double pulses was investigated for extreme ultraviolet lithography source. Debris from Sn droplet target was visualized by the laser-induced fluorescence imaging and shadowgraph imaging.

元の言語英語
ホスト出版物のタイトルConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009
出版物ステータス出版済み - 12 1 2009
イベントConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009 - Shanghai, 中国
継続期間: 8 30 20099 3 2009

出版物シリーズ

名前Optics InfoBase Conference Papers
ISSN(電子版)2162-2701

その他

その他Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009
中国
Shanghai
期間8/30/099/3/09

Fingerprint

Extreme ultraviolet lithography
Ablation
Tin
ablation
Light sources
tin
light sources
lithography
shadowgraph photography
Imaging techniques
debris
Debris
laser induced fluorescence
Fluorescence
Lasers
pulses

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

これを引用

Nakamura, D., Okazaki, K., Akiyama, T., Toya, K., Takahashi, A., Okada, T., ... Endo, A. (2009). Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009 (Optics InfoBase Conference Papers).

Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source. / Nakamura, D.; Okazaki, K.; Akiyama, T.; Toya, K.; Takahashi, A.; Okada, T.; Yanagida, T.; Ueno, Y.; Sasaki, Y.; Suganuma, T.; Nakano, M.; Komori, H.; Sumitani, A.; Endo, A.

Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009. 2009. (Optics InfoBase Conference Papers).

研究成果: 著書/レポートタイプへの貢献会議での発言

Nakamura, D, Okazaki, K, Akiyama, T, Toya, K, Takahashi, A, Okada, T, Yanagida, T, Ueno, Y, Sasaki, Y, Suganuma, T, Nakano, M, Komori, H, Sumitani, A & Endo, A 2009, Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009. Optics InfoBase Conference Papers, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009, Shanghai, 中国, 8/30/09.
Nakamura D, Okazaki K, Akiyama T, Toya K, Takahashi A, Okada T その他. Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009. 2009. (Optics InfoBase Conference Papers).
Nakamura, D. ; Okazaki, K. ; Akiyama, T. ; Toya, K. ; Takahashi, A. ; Okada, T. ; Yanagida, T. ; Ueno, Y. ; Sasaki, Y. ; Suganuma, T. ; Nakano, M. ; Komori, H. ; Sumitani, A. ; Endo, A. / Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source. Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009. 2009. (Optics InfoBase Conference Papers).
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