Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source

D. Nakamura, K. Okazaki, T. Akiyama, K. Toya, A. Takahashi, T. Okada, T. Yanagida, Y. Ueno, Y. Sasaki, T. Suganuma, M. Nakano, H. Komori, A. Sumitani, A. Endo

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

The ablation dynamics of tin micro-droplet target irradiated by double pulses was investigated for extreme ultraviolet lithography source. Debris from Sn droplet target was visualized by the laser-induced fluorescence imaging and shadowgraph imaging.

元の言語英語
ホスト出版物のタイトルCLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics
DOI
出版物ステータス出版済み - 12 10 2009
イベントCLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics - Shanghai, 中国
継続期間: 8 30 20099 3 2009

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

その他

その他CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics
中国
Shanghai
期間8/30/099/3/09

Fingerprint

Extreme ultraviolet lithography
Tin
Ablation
ablation
Light sources
tin
light sources
lithography
shadowgraph photography
Imaging techniques
debris
Debris
laser induced fluorescence
Fluorescence
Lasers
pulses

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

これを引用

Nakamura, D., Okazaki, K., Akiyama, T., Toya, K., Takahashi, A., Okada, T., ... Endo, A. (2009). Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source. : CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics [5292242] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2009.5292242

Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source. / Nakamura, D.; Okazaki, K.; Akiyama, T.; Toya, K.; Takahashi, A.; Okada, T.; Yanagida, T.; Ueno, Y.; Sasaki, Y.; Suganuma, T.; Nakano, M.; Komori, H.; Sumitani, A.; Endo, A.

CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics. 2009. 5292242 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Nakamura, D, Okazaki, K, Akiyama, T, Toya, K, Takahashi, A, Okada, T, Yanagida, T, Ueno, Y, Sasaki, Y, Suganuma, T, Nakano, M, Komori, H, Sumitani, A & Endo, A 2009, Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source. : CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics., 5292242, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics, Shanghai, 中国, 8/30/09. https://doi.org/10.1109/CLEOPR.2009.5292242
Nakamura D, Okazaki K, Akiyama T, Toya K, Takahashi A, Okada T その他. Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source. : CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics. 2009. 5292242. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2009.5292242
Nakamura, D. ; Okazaki, K. ; Akiyama, T. ; Toya, K. ; Takahashi, A. ; Okada, T. ; Yanagida, T. ; Ueno, Y. ; Sasaki, Y. ; Suganuma, T. ; Nakano, M. ; Komori, H. ; Sumitani, A. ; Endo, A. / Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source. CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics. 2009. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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AU - Okazaki, K.

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AU - Toya, K.

AU - Takahashi, A.

AU - Okada, T.

AU - Yanagida, T.

AU - Ueno, Y.

AU - Sasaki, Y.

AU - Suganuma, T.

AU - Nakano, M.

AU - Komori, H.

AU - Sumitani, A.

AU - Endo, A.

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