Diamond tip arrays for parallel lithography and data storage

Fumiya Watanabe, Makoto Arita, Teruaki Motooka, Ken Okano, Takatoshi Yamada

研究成果: ジャーナルへの寄稿記事

2 引用 (Scopus)

抜粋

We propose a device capable of massively parallel nanoscale lithography and data storage due to a uniform array of diamond tips. A prototype device is constructed and demonstrated by forming patterns on silicon wafer surfaces. In our initial study, surface layers on silicon are selectively removed in parallel by mechanical ablation and microsized carbon islands are deposited in air. Nearly all the lithographic and data storage techniques derived from proximal probe techniques are expected to benefit from the diamond tip array method.

元の言語英語
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
37
発行部数5 PART A
出版物ステータス出版済み - 5 1 1998

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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