Direct etching and implanted metalization in soft matter

K. Ichikawa, Y. Fukuyama, S. Maeda, Y. Yamanishi

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抜粋

We have successfully carried out direct implantable metallization (plating) on soft polymer such as PDMS using electrically induced microbubbles. Novelties of this technology is; 1. No requirement of complicated pretreatment procedure on the surface of any substrate before plating and which is unlike the non-electrolytic plating, 2. Resolution of the plating can be reached to several-tens micron within short time with low cost, 3. Robust metallization on wide range of material locally and precisely without any masks and so on. We evaluated robustness and resolution of metallization in our method.

元の言語英語
ホスト出版物のタイトル21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
出版者Chemical and Biological Microsystems Society
ページ421-422
ページ数2
ISBN(電子版)9780692941836
出版物ステータス出版済み - 1 1 2020
イベント21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 - Savannah, 米国
継続期間: 10 22 201710 26 2017

出版物シリーズ

名前21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017

会議

会議21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
米国
Savannah
期間10/22/1710/26/17

All Science Journal Classification (ASJC) codes

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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  • これを引用

    Ichikawa, K., Fukuyama, Y., Maeda, S., & Yamanishi, Y. (2020). Direct etching and implanted metalization in soft matter. : 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 (pp. 421-422). (21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017). Chemical and Biological Microsystems Society.