Dominant ion species in VHF SiH4/H2 plasma (frequency 60 MHz) were estimated from the sheath potential and the electron temperature measured with the Langmuir probe. As the concentration of SiH4/H 2 was increased, the transition of dominant ion species from H + to SiH3+ was observed. When the discharge gap was shorter than 10 mm, measured sheath potentials were anomalously low compared with the calculated ones.
|ジャーナル||Physica Status Solidi (C) Current Topics in Solid State Physics|
|出版物ステータス||出版済み - 5 27 2010|
|イベント||23rd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS23 - Utrecht, オランダ|
継続期間: 8 23 2009 → 8 28 2009
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics