Surface resistances are evaluated for dilute Zn substituted high quality ErBa2Cu3O7-δgilms. Dilute Zn substituted high quality ErBa2Cu3O7-δ films are grown on SrTiO3 substrates by a pulsed laser deposition technique. Targets used in the experiments are un-substituted, 0.3 at.%, 0.5 at.%, 1.0 at.% and 10 at.% Zn substituted ErBa2Cu3O7-δ ceramics. Crystal structures and surface resistance are evaluated. Zn substitution into YBa2Cu3O7-δ has been studied for understanding the origin of oxide superconductivity with substituting level of several ten %. In this study, dilute Zn below 1.0 at.% is mainly adopted. Further substitution reduces its critical temperature. We intended to introduce zero-dimensional superconductivity killer atoms into CuO2 plane as artificial pinning centers. The obtained Zn substituted ErBa2Cu3O7-δ films are c-axis oriented without peaks from other phases. The sharp drop temperature of surface resistance decreases as the Zn substitution. However, the surface resistance at low temperature around 20K is almost the same among the ErBa2Cu 3O7-δ films with different Zn substituting.