Effect of aging time on shape memory properties of sputtered Ni-rich Ni2MnGa alloy films

Motohiko Suzuki, Makoto Ohtsuka, Minoru Matsumoto, Yasukazu Murakami, Daisuke Shindo, Kimio Itagaki

研究成果: Contribution to journalArticle査読

17 被引用数 (Scopus)


Ni2MnGa alloy is an intelligent material with ferromagnetic and shape memory properties. The application of the alloy films to microactuators has been proposed. The Ni-rich Ni2MnGa alloy films with a thickness of nearly 5 μm were deposited on Al2O3 substrates by a radio-frequency magnetron sputtering apparatus using a Ni52Mn24Ga24 target. They were heat-treated at 1073 K for 36 ks for homogenization and ordering. The martensitic transformation temperatures of the heat-treated films were higher than room temperature. To investigate the effect of aging time on shape memory properties, the heat-treated films were aged at 673 K for various times between 0.9 and 57.6 ks in a constrained condition. The constraint-aged films showed the two-way shape memory effect by thermal cycling. Fine precipitates with a crystal structure of L12 were observed in the constraint-films aged for a long period. As for their two-way shape memory properties, a range of transformation temperature narrowed and the amount of macroscopic shape change increased with increasing aging time.

ジャーナルMaterials Transactions
出版ステータス出版済み - 1 1 2002

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学


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