Effect of carbon content on the tribological behavior of TiCxN1-x films prepared by arc-vapor deposition

Xuan Hoa Nguyen, In Ki Kim, Byung Koog Jang, Yoon Suk Oh

研究成果: Contribution to journalArticle査読

2 被引用数 (Scopus)


The effects of carbon content on the tribological behavior of titanium carbonitride(TiCxN1-x) films have been studied herein. A set of titanium carbonitride(TiCxN1-x) films was prepared by arc ion plating with a pure Ti target and a gas mixture of C2H2/N2 on a steel substrate. High-definition field-emission scanning electron microscopy (FESEM) was used to investigate the microstructure of the films. The chemical composition of the films was analyzed using both electron dispersion spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) analysis. The surface roughness and microhardness of the films were measured using α-step profilometer and nanoindenter respectively. The tribology of titanium carbonitride(TiCxN1-x) films was investigated using a ballon-disc testing method and the wear tracks were observed by low-magnification SEM. The tribological behavior of the films was significantly changed with variation of the C2H2/N2 gas ratio. A very low friction coefficient (0.07) of titanium carbonitride(TiCxN1-x) film was observed when the C2H2:N2 gas ratio was about 3:2.

ジャーナルJournal of the Ceramic Society of Japan
出版ステータス出版済み - 12 2013

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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