Effect of Coating Self-Assembled Monolayer on Room-Temperature Bonding of Cu Micro-Interconnects

Lising Qiu, Akihiro Ikeda, Tanemasa Asano

研究成果: ジャーナルへの寄稿記事

元の言語英語
ページ(範囲)068004-1-3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
52
発行部数6
出版物ステータス出版済み - 6 2013

これを引用

Effect of Coating Self-Assembled Monolayer on Room-Temperature Bonding of Cu Micro-Interconnects. / Qiu, Lising; Ikeda, Akihiro; Asano, Tanemasa.

:: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 巻 52, 番号 6, 06.2013, p. 068004-1-3.

研究成果: ジャーナルへの寄稿記事

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