Effect of composition of MOCVD-SrRuO3 top electrode of (Pb, La)(Zr, Ti)O3 capacitor on H2 degradation

Norikazu Okuda, Noriyuki Higashi, Takayuki Watanabe, Hiroshi Funakubo

研究成果: ジャーナルへの寄稿記事

1 引用 (Scopus)

抄録

The effect of the composition of MOCVD-SrRuO3 film was investigated not only on its property but also on the character as the top electrode of (Pb, La)(Zr, Ti)O3[PLZT] capacitor for H2 degradation. Resistivity of SrRuO3 film increased by the heat treatment under H2 contained atmosphere but was recovered by the heat treatment at 450 °C under O2 atmosphere. When Ru excess and the stoichiometric SrRuO3 films deposited at 600 °C were used as top electrodes, the remanent polarization(Pr) value of SrRuO3/PLZT/Pt capacitor was almost the same as that of Pt top electrode. On the other hand, when Sr excess SrRuO3 film was used as a top electrode, apparent Pr value decreased. After the heat treatment under 3 % H2 atmosphere at 270°C and the following that under O2 atmosphere at 450 °C, Pr value was perfectly recovered when using the stoichiometric SrRuO3 film as a top electrode. However, Pr value was 50% when Ru excess SrRuO 3 was used as a top electrode and hysteresis loops was not observed when using Sr excess SrRuO3 as a top electrode. Moreover, no degradation was observed for fatigue test up to 1010 cycles when MOCVD-SrRuO3 was used as a top electrode. These data showed that MOCVD-SrRuO3 film with stoichiometric composition is a useful top electrode for PLZT ferroelectric capacitor.

元の言語英語
ページ(範囲)57-62
ページ数6
ジャーナルFerroelectrics
260
発行部数1
DOI
出版物ステータス出版済み - 12 1 2001
外部発表Yes

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Metallorganic chemical vapor deposition
metalorganic chemical vapor deposition
capacitors
Capacitors
degradation
Degradation
Electrodes
electrodes
Chemical analysis
atmospheres
heat treatment
Heat treatment
polarization
Polarization
fatigue tests
Remanence
Hysteresis loops
Ferroelectric materials
hysteresis
Fatigue of materials

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

これを引用

Effect of composition of MOCVD-SrRuO3 top electrode of (Pb, La)(Zr, Ti)O3 capacitor on H2 degradation. / Okuda, Norikazu; Higashi, Noriyuki; Watanabe, Takayuki; Funakubo, Hiroshi.

:: Ferroelectrics, 巻 260, 番号 1, 01.12.2001, p. 57-62.

研究成果: ジャーナルへの寄稿記事

Okuda, Norikazu ; Higashi, Noriyuki ; Watanabe, Takayuki ; Funakubo, Hiroshi. / Effect of composition of MOCVD-SrRuO3 top electrode of (Pb, La)(Zr, Ti)O3 capacitor on H2 degradation. :: Ferroelectrics. 2001 ; 巻 260, 番号 1. pp. 57-62.
@article{1b46a2ee42424e7283dfc63ff40812a0,
title = "Effect of composition of MOCVD-SrRuO3 top electrode of (Pb, La)(Zr, Ti)O3 capacitor on H2 degradation",
abstract = "The effect of the composition of MOCVD-SrRuO3 film was investigated not only on its property but also on the character as the top electrode of (Pb, La)(Zr, Ti)O3[PLZT] capacitor for H2 degradation. Resistivity of SrRuO3 film increased by the heat treatment under H2 contained atmosphere but was recovered by the heat treatment at 450 °C under O2 atmosphere. When Ru excess and the stoichiometric SrRuO3 films deposited at 600 °C were used as top electrodes, the remanent polarization(Pr) value of SrRuO3/PLZT/Pt capacitor was almost the same as that of Pt top electrode. On the other hand, when Sr excess SrRuO3 film was used as a top electrode, apparent Pr value decreased. After the heat treatment under 3 {\%} H2 atmosphere at 270°C and the following that under O2 atmosphere at 450 °C, Pr value was perfectly recovered when using the stoichiometric SrRuO3 film as a top electrode. However, Pr value was 50{\%} when Ru excess SrRuO 3 was used as a top electrode and hysteresis loops was not observed when using Sr excess SrRuO3 as a top electrode. Moreover, no degradation was observed for fatigue test up to 1010 cycles when MOCVD-SrRuO3 was used as a top electrode. These data showed that MOCVD-SrRuO3 film with stoichiometric composition is a useful top electrode for PLZT ferroelectric capacitor.",
author = "Norikazu Okuda and Noriyuki Higashi and Takayuki Watanabe and Hiroshi Funakubo",
year = "2001",
month = "12",
day = "1",
doi = "10.1080/00150190108015994",
language = "English",
volume = "260",
pages = "57--62",
journal = "Ferroelectrics",
issn = "0015-0193",
publisher = "Taylor and Francis Ltd.",
number = "1",

}

TY - JOUR

T1 - Effect of composition of MOCVD-SrRuO3 top electrode of (Pb, La)(Zr, Ti)O3 capacitor on H2 degradation

AU - Okuda, Norikazu

AU - Higashi, Noriyuki

AU - Watanabe, Takayuki

AU - Funakubo, Hiroshi

PY - 2001/12/1

Y1 - 2001/12/1

N2 - The effect of the composition of MOCVD-SrRuO3 film was investigated not only on its property but also on the character as the top electrode of (Pb, La)(Zr, Ti)O3[PLZT] capacitor for H2 degradation. Resistivity of SrRuO3 film increased by the heat treatment under H2 contained atmosphere but was recovered by the heat treatment at 450 °C under O2 atmosphere. When Ru excess and the stoichiometric SrRuO3 films deposited at 600 °C were used as top electrodes, the remanent polarization(Pr) value of SrRuO3/PLZT/Pt capacitor was almost the same as that of Pt top electrode. On the other hand, when Sr excess SrRuO3 film was used as a top electrode, apparent Pr value decreased. After the heat treatment under 3 % H2 atmosphere at 270°C and the following that under O2 atmosphere at 450 °C, Pr value was perfectly recovered when using the stoichiometric SrRuO3 film as a top electrode. However, Pr value was 50% when Ru excess SrRuO 3 was used as a top electrode and hysteresis loops was not observed when using Sr excess SrRuO3 as a top electrode. Moreover, no degradation was observed for fatigue test up to 1010 cycles when MOCVD-SrRuO3 was used as a top electrode. These data showed that MOCVD-SrRuO3 film with stoichiometric composition is a useful top electrode for PLZT ferroelectric capacitor.

AB - The effect of the composition of MOCVD-SrRuO3 film was investigated not only on its property but also on the character as the top electrode of (Pb, La)(Zr, Ti)O3[PLZT] capacitor for H2 degradation. Resistivity of SrRuO3 film increased by the heat treatment under H2 contained atmosphere but was recovered by the heat treatment at 450 °C under O2 atmosphere. When Ru excess and the stoichiometric SrRuO3 films deposited at 600 °C were used as top electrodes, the remanent polarization(Pr) value of SrRuO3/PLZT/Pt capacitor was almost the same as that of Pt top electrode. On the other hand, when Sr excess SrRuO3 film was used as a top electrode, apparent Pr value decreased. After the heat treatment under 3 % H2 atmosphere at 270°C and the following that under O2 atmosphere at 450 °C, Pr value was perfectly recovered when using the stoichiometric SrRuO3 film as a top electrode. However, Pr value was 50% when Ru excess SrRuO 3 was used as a top electrode and hysteresis loops was not observed when using Sr excess SrRuO3 as a top electrode. Moreover, no degradation was observed for fatigue test up to 1010 cycles when MOCVD-SrRuO3 was used as a top electrode. These data showed that MOCVD-SrRuO3 film with stoichiometric composition is a useful top electrode for PLZT ferroelectric capacitor.

UR - http://www.scopus.com/inward/record.url?scp=27744449249&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=27744449249&partnerID=8YFLogxK

U2 - 10.1080/00150190108015994

DO - 10.1080/00150190108015994

M3 - Article

VL - 260

SP - 57

EP - 62

JO - Ferroelectrics

JF - Ferroelectrics

SN - 0015-0193

IS - 1

ER -