Effect of contamination on quantitative X-ray microanalysis in the analytical electron microscope

Z. Horita, T. Sano, M. Nemoto

研究成果: ジャーナルへの寄稿記事

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It is shown that the contamination on a specimen surface leads to reduction of the characteristic intensities of low-energy lines because of the absorption. The X-ray path length in the contamination deposit which builds up in cone-shape by illumination of a finely focused electron beam is estimated from the reduction of characteristic intensities and compared with the average path length derived from the geometry of the deposit. The critical path length is introduced to define the negligible absorption in contamination for the characteristic lines of energies up to a few kilo electron volts.

元の言語英語
ページ(範囲)965-978
ページ数14
ジャーナルPhilosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
63
発行部数4
DOI
出版物ステータス出版済み - 4 1991

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All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)
  • Physics and Astronomy(all)

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