It is shown that the contamination on a specimen surface leads to reduction of the characteristic intensities of low-energy lines because of the absorption. The X-ray path length in the contamination deposit which builds up in cone-shape by illumination of a finely focused electron beam is estimated from the reduction of characteristic intensities and compared with the average path length derived from the geometry of the deposit. The critical path length is introduced to define the negligible absorption in contamination for the characteristic lines of energies up to a few kilo electron volts.
|ジャーナル||Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties|
|出版物ステータス||出版済み - 4 1991|
All Science Journal Classification (ASJC) codes
- Chemical Engineering(all)
- Physics and Astronomy(all)