Effect of crucible thermal conductivity on dislocation distribution in crystals in a silicon carbide physical vapor transport furnace

Kazuma Miyazaki, Satoshi Nakano, Shin ichi Nishizawa, Koichi Kakimoto

研究成果: ジャーナルへの寄稿学術誌査読

抄録

The effect of the thermal conductivity of a crucible in a silicon carbide physical vapor transport furnace on the dislocation distribution in crystal was investigated using numerical analysis. The numerical analysis includes stress and dislocation propagation calculations based on the Alexander–Haasen model. Modifying the thermal conductivity of the carbon crucible can reduce the dislocation density. It can also homogenize the temperature distribution in the radial distribution in the crystal. The density of dislocations could be further by reduced using a carbon crucible with low thermal conductivity.

本文言語英語
論文番号126981
ジャーナルJournal of Crystal Growth
603
DOI
出版ステータス出版済み - 2月 1 2023
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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