TY - JOUR
T1 - Effect of crucible thermal conductivity on dislocation distribution in crystals in a silicon carbide physical vapor transport furnace
AU - Miyazaki, Kazuma
AU - Nakano, Satoshi
AU - Nishizawa, Shin ichi
AU - Kakimoto, Koichi
N1 - Publisher Copyright:
© 2022 Elsevier B.V.
PY - 2023/2/1
Y1 - 2023/2/1
N2 - The effect of the thermal conductivity of a crucible in a silicon carbide physical vapor transport furnace on the dislocation distribution in crystal was investigated using numerical analysis. The numerical analysis includes stress and dislocation propagation calculations based on the Alexander–Haasen model. Modifying the thermal conductivity of the carbon crucible can reduce the dislocation density. It can also homogenize the temperature distribution in the radial distribution in the crystal. The density of dislocations could be further by reduced using a carbon crucible with low thermal conductivity.
AB - The effect of the thermal conductivity of a crucible in a silicon carbide physical vapor transport furnace on the dislocation distribution in crystal was investigated using numerical analysis. The numerical analysis includes stress and dislocation propagation calculations based on the Alexander–Haasen model. Modifying the thermal conductivity of the carbon crucible can reduce the dislocation density. It can also homogenize the temperature distribution in the radial distribution in the crystal. The density of dislocations could be further by reduced using a carbon crucible with low thermal conductivity.
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U2 - 10.1016/j.jcrysgro.2022.126981
DO - 10.1016/j.jcrysgro.2022.126981
M3 - Article
AN - SCOPUS:85144045887
SN - 0022-0248
VL - 603
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
M1 - 126981
ER -