Effect of Fe impurities on the generation of process-induced microdefects in Czochralski silicon crystals

Physics

• Oxide 66%
• Silicon 50%
• Crystal Defect 50%
• Crystals 33%
• Impurities 33%
• Oxidation 33%
• Precipitate 33%
• Wafer 33%
• Iron 16%
• Atoms 16%
• Sites 16%

Biochemistry, Genetics and Molecular Biology

• Nucleation 100%
• Stacking Fault 50%
• Volume 33%
• Alpha Oxidation 33%
• Surface Property 33%
• Crystal 33%
• Dislocation 33%
• Iron 16%
• Atom 16%