Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods

Tetsuya Shimogaki, Taihei Ofuji, Norihiro Tetsuyama, Kota Okazaki, Mitsuhiro Higashihata, Daisuke Nakamura, Hiroshi Ikenoue, Tanemasa Asano, Tatsuo Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We report on the effect of high repetition pulsed laser annealing with a KrF excimer laser on the optical properties of phosphorus ion-implanted ZnO nanorods. The recovery levels of phosphorus ion-implanted ZnO nanorods have been measured by photoluminescence spectra and cathode luminescence (CL) images. After ion implantation on the surface of ZnO nanorods, CL was disappeared over 400 nm below the surface due to the damage caused by ion implantation. When the annealing was performed at a low repetition, CL was recovered only shallow area below the surface. The depth of the annealed area was increased with the repetition rate of the annealing laser. By optimizing the annealing conditions such as the repetition rate, the irradiation fluence and so on, we have succeeded to anneal the whole damaged area over 400 nm in depth and to observe CL. Thus, the effectiveness of high repetition pulsed laser annealing on phosphorus ion-implanted ZnO nanorods was demonstrated.

元の言語英語
ホスト出版物のタイトルMaterials Science and Chemical Engineering
ページ383-386
ページ数4
DOI
出版物ステータス出版済み - 7 8 2013
イベント2013 International Conference on Materials Science and Chemical Engineering, MSCE 2013 - , シンガポール
継続期間: 2 20 20132 21 2013

出版物シリーズ

名前Advanced Materials Research
699
ISSN(印刷物)1022-6680

その他

その他2013 International Conference on Materials Science and Chemical Engineering, MSCE 2013
シンガポール
期間2/20/132/21/13

Fingerprint

Nanorods
Pulsed lasers
Phosphorus
Optical properties
Annealing
Luminescence
Cathodes
Ions
Ion implantation
Excimer lasers
Photoluminescence
Irradiation
Recovery
Lasers

All Science Journal Classification (ASJC) codes

  • Engineering(all)

これを引用

Shimogaki, T., Ofuji, T., Tetsuyama, N., Okazaki, K., Higashihata, M., Nakamura, D., ... Okada, T. (2013). Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods. : Materials Science and Chemical Engineering (pp. 383-386). (Advanced Materials Research; 巻数 699). https://doi.org/10.4028/www.scientific.net/AMR.699.383

Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods. / Shimogaki, Tetsuya; Ofuji, Taihei; Tetsuyama, Norihiro; Okazaki, Kota; Higashihata, Mitsuhiro; Nakamura, Daisuke; Ikenoue, Hiroshi; Asano, Tanemasa; Okada, Tatsuo.

Materials Science and Chemical Engineering. 2013. p. 383-386 (Advanced Materials Research; 巻 699).

研究成果: 著書/レポートタイプへの貢献会議での発言

Shimogaki, T, Ofuji, T, Tetsuyama, N, Okazaki, K, Higashihata, M, Nakamura, D, Ikenoue, H, Asano, T & Okada, T 2013, Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods. : Materials Science and Chemical Engineering. Advanced Materials Research, 巻. 699, pp. 383-386, 2013 International Conference on Materials Science and Chemical Engineering, MSCE 2013, シンガポール, 2/20/13. https://doi.org/10.4028/www.scientific.net/AMR.699.383
Shimogaki T, Ofuji T, Tetsuyama N, Okazaki K, Higashihata M, Nakamura D その他. Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods. : Materials Science and Chemical Engineering. 2013. p. 383-386. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.699.383
Shimogaki, Tetsuya ; Ofuji, Taihei ; Tetsuyama, Norihiro ; Okazaki, Kota ; Higashihata, Mitsuhiro ; Nakamura, Daisuke ; Ikenoue, Hiroshi ; Asano, Tanemasa ; Okada, Tatsuo. / Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods. Materials Science and Chemical Engineering. 2013. pp. 383-386 (Advanced Materials Research).
@inproceedings{3e18e7f4c300470087b44b1b189a9497,
title = "Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods",
abstract = "We report on the effect of high repetition pulsed laser annealing with a KrF excimer laser on the optical properties of phosphorus ion-implanted ZnO nanorods. The recovery levels of phosphorus ion-implanted ZnO nanorods have been measured by photoluminescence spectra and cathode luminescence (CL) images. After ion implantation on the surface of ZnO nanorods, CL was disappeared over 400 nm below the surface due to the damage caused by ion implantation. When the annealing was performed at a low repetition, CL was recovered only shallow area below the surface. The depth of the annealed area was increased with the repetition rate of the annealing laser. By optimizing the annealing conditions such as the repetition rate, the irradiation fluence and so on, we have succeeded to anneal the whole damaged area over 400 nm in depth and to observe CL. Thus, the effectiveness of high repetition pulsed laser annealing on phosphorus ion-implanted ZnO nanorods was demonstrated.",
author = "Tetsuya Shimogaki and Taihei Ofuji and Norihiro Tetsuyama and Kota Okazaki and Mitsuhiro Higashihata and Daisuke Nakamura and Hiroshi Ikenoue and Tanemasa Asano and Tatsuo Okada",
year = "2013",
month = "7",
day = "8",
doi = "10.4028/www.scientific.net/AMR.699.383",
language = "English",
isbn = "9783037856758",
series = "Advanced Materials Research",
pages = "383--386",
booktitle = "Materials Science and Chemical Engineering",

}

TY - GEN

T1 - Effect of high repetition pulsed laser annealing on optical properties of phosphorus ion-implanted ZnO nanorods

AU - Shimogaki, Tetsuya

AU - Ofuji, Taihei

AU - Tetsuyama, Norihiro

AU - Okazaki, Kota

AU - Higashihata, Mitsuhiro

AU - Nakamura, Daisuke

AU - Ikenoue, Hiroshi

AU - Asano, Tanemasa

AU - Okada, Tatsuo

PY - 2013/7/8

Y1 - 2013/7/8

N2 - We report on the effect of high repetition pulsed laser annealing with a KrF excimer laser on the optical properties of phosphorus ion-implanted ZnO nanorods. The recovery levels of phosphorus ion-implanted ZnO nanorods have been measured by photoluminescence spectra and cathode luminescence (CL) images. After ion implantation on the surface of ZnO nanorods, CL was disappeared over 400 nm below the surface due to the damage caused by ion implantation. When the annealing was performed at a low repetition, CL was recovered only shallow area below the surface. The depth of the annealed area was increased with the repetition rate of the annealing laser. By optimizing the annealing conditions such as the repetition rate, the irradiation fluence and so on, we have succeeded to anneal the whole damaged area over 400 nm in depth and to observe CL. Thus, the effectiveness of high repetition pulsed laser annealing on phosphorus ion-implanted ZnO nanorods was demonstrated.

AB - We report on the effect of high repetition pulsed laser annealing with a KrF excimer laser on the optical properties of phosphorus ion-implanted ZnO nanorods. The recovery levels of phosphorus ion-implanted ZnO nanorods have been measured by photoluminescence spectra and cathode luminescence (CL) images. After ion implantation on the surface of ZnO nanorods, CL was disappeared over 400 nm below the surface due to the damage caused by ion implantation. When the annealing was performed at a low repetition, CL was recovered only shallow area below the surface. The depth of the annealed area was increased with the repetition rate of the annealing laser. By optimizing the annealing conditions such as the repetition rate, the irradiation fluence and so on, we have succeeded to anneal the whole damaged area over 400 nm in depth and to observe CL. Thus, the effectiveness of high repetition pulsed laser annealing on phosphorus ion-implanted ZnO nanorods was demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=84879644813&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84879644813&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMR.699.383

DO - 10.4028/www.scientific.net/AMR.699.383

M3 - Conference contribution

AN - SCOPUS:84879644813

SN - 9783037856758

T3 - Advanced Materials Research

SP - 383

EP - 386

BT - Materials Science and Chemical Engineering

ER -