Effect of Ni-Cu substrates on phase selection of hexagonal and cubic boron nitride thin films

Shigeo Kotake, Takaya Hasegawa, Kazutaka Kamiya, Yasuyuki Suzuki, Takami Masui, Yoshihiro Kangawa, Kohji Nakamura, Tomonori Ito

研究成果: Contribution to journalArticle査読

4 被引用数 (Scopus)

抄録

In this study, the dependence of the phase selection of BN on the lattice parameter and the crystal structure of the substrate was clarified. BN thin film was prepared by reaction RF sputtering method on polycrystalline Ni-Cu complete solid solution alloy. Using empirical potentials, the polytypes of BN thin films were systematically investigated by considering lattice constraint due to various interface atomic arrangements and orientations such as c-BN or h-BN on cubic (0 0 1) or (1 1 1) substrates. From IR spectrum, merely c-BN phase was observed from the specimen on Cu and Ni0.8-Cu0.2 alloy. Moreover, the empirical potential calculations reveal that c-BN thin films on (0 0 1) substrates can be stabilized in the substrate lattice parameter of 3.2 < a <4.4 Å including Cu and Ni at both thin film and interface regions. From these experimental and calculated results, the strain energy at the semiconductor-metal interface proved to be dominant factor for the phase selection of BN thin films.

本文言語英語
ページ(範囲)72-77
ページ数6
ジャーナルApplied Surface Science
216
1-4 SPEC.
DOI
出版ステータス出版済み - 6 30 2003
外部発表はい

All Science Journal Classification (ASJC) codes

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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