Effects of aluminum incorporation on diamond grain growth in ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition

Yüki Katamune, Shinya Ohmagari, Itsuroh Suzuki, Tsuyoshi Yoshitake

    研究成果: Contribution to journalArticle査読

    2 被引用数 (Scopus)

    抄録

    Al-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were prepared by coaxial arc plasma deposition with an Al-blended graphite target. The grain size estimated from X-ray diffraction peaks was 27 nm; this value is an order of magnitude larger than that of unincorporated films. The appearance of diamond-200 and 222 peaks, which generally disappear due to the extinction rule of diffraction, and the dilation of lattice, implied the incorporation of Al atoms into the lattices. The near-edge X-ray absorption fine-structure showed a sharp exciton peak due to diamond, which is attributed to the enlarged grains.

    本文言語英語
    論文番号068002
    ジャーナルJapanese journal of applied physics
    51
    6 PART 1
    DOI
    出版ステータス出版済み - 6 2012

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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