Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

研究成果: ジャーナルへの寄稿会議記事査読

5 被引用数 (Scopus)

抄録

We have developed a cluster-eliminating filter which reduces amount of amorphous silicon nanoparticles (clusters) incorporated into a-Si:H films. We have measured film thickness dependence of a ratio of a hydrogen content associated with Si-H2 bonds (CSiH2) to that with Si-H bonds (CSiH) as a parameter of the filter gap (dgap). The cluster removal efficiency increases with decreasing dgap. CSiH2 and the ratio of CSiH2 to CSiH decrease with increasing the film thickness, suggesting the amount of incorporated clusters is high near the interface between the film and the substrate.

本文言語英語
論文番号012007
ジャーナルJournal of Physics: Conference Series
518
1
DOI
出版ステータス出版済み - 2014
イベント26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, 日本
継続期間: 9月 23 20139月 24 2013

!!!All Science Journal Classification (ASJC) codes

  • 物理学および天文学(全般)

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