Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

研究成果: Contribution to journalConference article

3 引用 (Scopus)

抜粋

We have developed a cluster-eliminating filter which reduces amount of amorphous silicon nanoparticles (clusters) incorporated into a-Si:H films. We have measured film thickness dependence of a ratio of a hydrogen content associated with Si-H2 bonds (CSiH2) to that with Si-H bonds (CSiH) as a parameter of the filter gap (dgap). The cluster removal efficiency increases with decreasing dgap. CSiH2 and the ratio of CSiH2 to CSiH decrease with increasing the film thickness, suggesting the amount of incorporated clusters is high near the interface between the film and the substrate.

元の言語英語
記事番号012007
ジャーナルJournal of Physics: Conference Series
518
発行部数1
DOI
出版物ステータス出版済み - 1 1 2014
イベント26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, 日本
継続期間: 9 23 20139 24 2013

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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