Effects of hydrogen and nitrogen atmospheres on growth of ultrananocrystalline diamond/amorphous carbon composite films by reactive pulsed laser deposition

Sausan Al-Riyami, Mahmoud Shaban, Hiroki Gima, Tsuyoshi Yoshitake

    研究成果: Contribution to journalArticle

    4 被引用数 (Scopus)

    抄録

    The growth of ultrananocrystalline diamond/nonhydrogenated amorphous carbon composite films was realized by pulsed laser deposition with a graphite target in a nitrogen atmosphere totally excluding hydrogen. The existence of 7 nm diamond grains was confirmed by X-ray diffraction. Nitrogen incorporation into the films was confirmed by X-ray photoemission and near-edge X-ray absorption structure spectroscopies, and the nitrogenation produced n-type conduction with an electrical conductivity of 0.2-1 cm-1 at 300 K. The results of study proved that nitrogen acts as a reactive gas for the formation of diamond grains, similarly to hydrogen.

    本文言語英語
    論文番号06GG06
    ジャーナルJapanese journal of applied physics
    52
    6 PART 2
    DOI
    出版ステータス出版済み - 6 2013

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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