Effects of hydrogen introduction on electrical and optical properties of Cd-doped Ge oxide and Zn oxide thin films

Makoto Arita, Hirofumi Konishi, Kouichi Matsuda, Masataka Masuda, Yasunori Hayashi

研究成果: ジャーナルへの寄稿学術誌査読

10 被引用数 (Scopus)

抄録

Cadmium-doped Ge oxide and Zn oxide thin films were deposited by RF magnetron sputtering. The electrical and optical properties of these films were investigated. All deposited films except for highly Cd-doped Ge oxide were transparent to visible light. Hydrogen introduction reduced the resistivity of the films, although the optical transmittance for visible light did not change significantly. The enhancement of conductivity could be attributed to the increase in carder density by the hydrogen introduction.

本文言語英語
ページ(範囲)1142-1145
ページ数4
ジャーナルMaterials Transactions
43
5
DOI
出版ステータス出版済み - 5月 2002
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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