Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering

Tomoaki Ide, Koichi Matsushima, Ryota Shimizu, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

研究成果: ジャーナルへの寄稿Conference article

抄録

Effects of surface morphology of buffer layers on ZnO/sapphire heteroepitaxial growth have been investigated by means of "nitrogen mediated crystallization (NMC) method", where the crystal nucleation and growth are controlled by absorbed nitrogen atoms. We found a strong correlation between the height distribution profile of NMC-ZnO buffer layers and the crystal quality of ZnO films. On the buffer layer with a sharp peak in height distribution, a single-crystalline ZnO film with atomically-flat surface was grown. Our results indicate that homogeneous and high-density nucleation at the initial growth stages is critical in heteroepitaxy of ZnO on lattice mismatched substrates.

元の言語英語
ページ(範囲)41-46
ページ数6
ジャーナルMaterials Research Society Symposium Proceedings
1741
発行部数January
DOI
出版物ステータス出版済み - 1 1 2015
イベント2014 MRS Fall Meeting - Boston, 米国
継続期間: 11 30 201412 5 2014

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Aluminum Oxide
Buffer layers
Epitaxial growth
Sapphire
Magnetron sputtering
magnetron sputtering
sapphire
Nitrogen
buffers
Crystallization
Nucleation
nucleation
crystallization
nitrogen
Crystals
Crystal lattices
nitrogen atoms
crystals
Surface morphology
flat surfaces

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

これを引用

Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering. / Ide, Tomoaki; Matsushima, Koichi; Shimizu, Ryota; Yamashita, Daisuke; Seo, Hyunwoong; Koga, Kazunori; Shiratani, Masaharu; Itagaki, Naho.

:: Materials Research Society Symposium Proceedings, 巻 1741, 番号 January, 01.01.2015, p. 41-46.

研究成果: ジャーナルへの寄稿Conference article

Ide, Tomoaki ; Matsushima, Koichi ; Shimizu, Ryota ; Yamashita, Daisuke ; Seo, Hyunwoong ; Koga, Kazunori ; Shiratani, Masaharu ; Itagaki, Naho. / Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering. :: Materials Research Society Symposium Proceedings. 2015 ; 巻 1741, 番号 January. pp. 41-46.
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AU - Seo, Hyunwoong

AU - Koga, Kazunori

AU - Shiratani, Masaharu

AU - Itagaki, Naho

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