The efficient, anhydrous proton-conducting nanofilms of Y-doped zirconium pyrophosphate at intermediate temperatures was investigated. The films of yttrium-doped zirconium phosphate were deposited on an indium tin oxide (ITO) substrate in a layer-by-layer fashion by using a mixture of zirconium tetra-n-butoxide, yttrium methoxyethoxide, and P2O5 as precursor. An Y-doped zirconium phosphate layer was deposited onto the ITO substrate by spin-coating with a Mikasa 1H-D7 spin coater. The proton conductivity of the as-fabricated films was measured by the ac impedence method. Pt electrodes were deposited on the top of the nanofilms through a shadow mask to form a Pt/film/ITO stack. It was observed that the nanofilms of amorphous aluminosilicate gave high proton conductivities with a low ASR value of 0.24Ωcm2 at 400°C.
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